We have designed and characterized a MEMS-based Fabry–Perot device (MFPD) to measure vibration at high temperatures. The MFPD consists of a micromachined cavity formed between a substrate and a top thin film structure in the form of a cantilever beam. When affixed to a vibrating surface, the amplitude and frequency of vibration are determined by illuminating the MFPD top mirror with a monochromatic light source and analyzing the back-reflected light to determine the deflection of the beam with respect to the substrate. Given the device geometry, a mechanical transfer function is calculated to permit the substrate motion to be determined from the relative motion of the beam with respect to the substrate. Because the thin film cantilever beam and the substrate are approximately parallel, this two-mirror cavity arrangement does not require alignment or sophisticated stabilization techniques. The uncooled high-temperature operational capability of the MFPD provides a viable low-cost alternative to sensors that require environmentally controlled packages to operate at high temperature. The small size of the MFPD (85–175 µm) and the choice of materials in which it can be manufactured (silicon nitride and silicon carbide) make it ideal for high-temperature applications. Relative displacements in the sub-nanometer range have been measured and close agreement was found between the measured sensor frequency response and the theoretical predictions based on analytical models.

This research reports an improved conjugation process for immobilization of antibodies on carboxyl ended self-assembled monolayers (SAMs). The kinetics of antibody/SAM binding in microfluidic heterogeneous immunoassays has been studied through numerical simulation and experiments. Through numerical simulations, the mass transport of reacting species, namely, antibodies and crosslinking reagent, is related to the available surface concentration of carboxyl ended SAMs in a microchannel. In the bulk flow, the mass transport equation (diffusion and convection) is coupled to the surface reaction between the antibodies and SAM. The model developed is employed to study the effect of the flow rate, conjugating reagents concentration, and height of the microchannel. Dimensionless groups, such as the Damköhler number, are used to compare the reaction and fluidic phenomena present and justify the kinetic trends observed. Based on the model predictions, the conventional conjugation protocol is modified to increase the yield of conjugation reaction. A quartz crystal microbalance device is implemented to examine the resulting surface density of antibodies. As a result, an increase in surface density from 321 ng/cm², in the conventional protocol, to 617 ng/cm² in the modified protocol is observed, which is quite promising for (bio-) sensing applications.

Bilayer microcantilevers are normally curved because of fabrication-induced stresses. When used in biological/chemical sensing applications, the absorption of target agents onto the functionalized surface of the microcantilever creates a surface stress that shifts its resonance frequency. Despite numerous efforts, the mechanisms of surface stress-induced shift in the resonance frequency of microcantilevers remain elusive. To address this problem, this work presents a detailed analysis of the frequency response of microcantilevers, with different width-to-thickness ratios and curvature levels, using classical lamination theory and the Rayleigh–Ritz method. Based on the results of this analysis, a new relationship between resonance frequency shift and curvature variation due to differential surface stress loading is established. By comparing the strain energies associated with the in-plane and out-of-plane displacements of the microcantilever at different curvature levels, a new implicit model for surface stress-induced resonance frequency shift in microcantilevers is presented. Verified against the results of experiments carried out on gold/polysilicon microcantilevers, the new model is expected to provide a better understanding of surface stress-microcantilever resonator interaction, which is critical to systematic optimization of resonance-based micro sensors.