Fang Dong

Fang Dong


Research Focus & Metrics

Academic Career Length

2Years (2025-Present)

(Calculated once Scilit publication data is synced: current year − year of first publication + 1)

Representative Publications

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14 April 2025 in Materials
Verified
Journal Article
Open access
PDF file
XHXu Han
Xu Han
ZJZhou Jiantao
Zhou Jiantao
RLRui Li
Rui Li
SWShizhao Wang
Shizhao Wang
FDFang Dong
Fang Dong
SLSheng Liu
Sheng Liu
4H-SiC (silicon carbide), known as the third-generation semiconductor, has been widely used in high-power electronic devices. However, surface defects on wafers can seriously affect the key parameters and stability of silicon carbide devices. In this work, we pioneered a dual-laser comparative framework to systematically investigate the effects of continuous wave (CW) and femtosecond (FS) pulse laser micromachining on 4H-SiC epitaxial layers. CW laser restructuring optimized lattice integrity at sub-melting thresholds, while ultrafast FS pulse laser achieved submicron roughness control (from 8 μm to <0.5 μm) without obvious thermal collateral damage. To reveal the dynamic mechanism during the laser modification, multi-physics finite element models were adopted that decouple thermal and non-thermal mechanisms. This work expands the feasibility of laser micromachining for next-generation SiC device manufacturing.