Periodically modulated optical coatings, fabricated by depositing conformal films on modulated substrates, offer unique capabilities for spectral and spatial filtering of light. However, conventional deposition methods often do not achieve required replication and conformality on submicron-size structured surfaces. In this paper, we compare various thin film deposition techniques, including electron beam evaporation, atomic layer deposition, and ion beam sputtering, to evaluate their ability to control multilayer coating growth on periodically modulated substrates. Our study demonstrates that both single-layer and multilayer coatings produced by ion beam sputtering effectively replicate the initial geometry of structured surfaces, thereby enhancing optical performance.

Zero incidence angle spatial filters of a compact design can be very useful, among others, for intracavity spatial filtering in high-power micro-lasers. Typically, micro-lasers, especially in high-power operation regimes, emit beams of low spatial quality due to the large aspect ratio of the laser resonator. A promising proposal for compact spatial filtering is the integration of the Photonic Crystals structures into the micro-resonator of the laser. Here, we report efficient spatial filters with desired filtering properties engineered by the inverse design. Such filters can be designed not only separately for both polarizations of the incident radiation but also simultaneously for both S and P polarizations. Moreover, we fabricate the inverse-designed structure by physical vapor deposition and highlight good correspondence of the angle-wavelength transmission map to the target one.

The effectiveness of ultrashort pulse compression depends on the coatings group delay dispersion (GDD) characteristics in chirped mirror (CM)-based optical systems. Current porous-layer-based CMs with low GDD oscillations are limited to less than half optical octave spectral bandwidth and the stability of their spectral parameters is still unknown. In order to address these limitations, a broadband CM (covering 400 nm bandwidth) with a porous top layer was deposited and spectral parameters were measured at different environmental conditions. The modeled refractive index of the porous layer varied by approximately 1% due to the changes in humidity. Deposited coatings exhibited low sensitivity of GDD oscillations to deposition errors of porous layer and humidity in the surrounding environment.

Periodically modulated optical coatings, fabricated by depositing conformal films on modulated substrates, offer unique capabilities for spectral and spatial filtering of light. However, conventional deposition methods often do not achieve the required replication and conformality on submicron-size structured surfaces. In this paper, we compare various thin film deposition techniques, including electron beam evaporation, atomic layer deposition, and ion beam sputtering, to evaluate their ability to control multilayer coating growth on periodically modulated substrates. Our study demonstrates that both single-layer and multilayer coatings produced by ion beam sputtering effectively replicate the initial geometry of structured surfaces, thereby enhancing optical performance.

Chirped mirrors covering 200 nm bandwidth were deposited for laser-induced damage threshold (LIDT) testing. Coating designs were optimized to achieve better LIDT performance. After LIDT testing morphology of damage sites was analyzed.