The generation of ozone by dielectric barrier discharge (DBD) is widely used for water and wastewater treatment, the control of catalytic reactions, and surface treatment. Recently, a need for compact, effective, and economical ozone and reactive oxygen–nitrogen species (RONS) generators for medical, biological, and agricultural applications has been observed. In this study, a novel hybrid DBD (HDBD) reactor fulfilling such requirements is presented. Its structured high-voltage (HV) electrode allows for the ignition of both the surface and volume microdischarges contributing to plasma generation. A Peltier module cooling of the dielectric barrier, made of alumina, allows for the efficient control of plasma chemistry. The typical electrical power consumption of this device is below 30 W. The operation frequency of the DBD driver oscillating in the auto-resonance mode is from 20 to 40 kHz. The specific energy input (SEI) of the reactor was controlled by the DBD driver input voltage in the range from 10.5 to 18.0 V, the Peltier current from 0 to 4.5 A, the duty cycle of the pulse-width modulated (PWM) power varied from 0 to 100%, and the gas flow from 0.5 to 10 SLM. The operation with oxygen, synthetic air, and compressed dry air (CDA) was characterized. The ultraviolet light (UV) absorption technique was implemented for the measurement of the ozone concentration. The higher harmonics of the discharge current observed in the frequency range of 5 to 50 MHz were used for monitoring the discharge net power.

Reactive oxygen–nitrogen species (RONS) production in a Peltier-cooled hybrid dielectric barrier discharge (HDBD) reactor operated with humid air is characterized. Fourier-transform infrared spectroscopy (FTIR) is used to determine the RONS in the HDBD-produced gases. The presence of molecules ${\mathrm{O}}_3$, ${\mathrm{NO}}_2$, ${\mathrm{N}}_2$O, ${\mathrm{N}}_2{\mathrm{O}}_5$, and ${\mathrm{HNO}}_3$ is evaluated. The influence of HDBD reactor operation parameters on the FTIR result is discussed. The strongest influence of Peltier cooling on RONS chemistry is reached at conditions related to a high specific energy input (SEI): high voltage and duty cycle of plasma width modulation (PWM), and low gas flow. Both PWM and Peltier cooling can achieve a change in the chemistry from oxygen-based to nitrogen-based. ${\mathrm{N}}_2{\mathrm{O}}_5$ and ${\mathrm{HNO}}_3$ are detected at a low humidity of 7% in the reactor input air but not at humidity exceeding 90%. In addition to the FTIR analysis, the plasma-activated water (PAW) is investigated. PAW is produced by bubbling the HDBD plasma gas through 12.5 mL of distilled water in a closed-loop circulation at a high SEI. Despite the absence of ${\mathrm{N}}_2{\mathrm{O}}_5$ and ${\mathrm{HNO}}_3$ in the gas phase, the acidity of the PAW is increased. The pH value decreases on average by 0.12 per minute.