Experimental and simulation analysis was conducted on the effects of 532 nm nanosecond laser-induced thermal damage on the front-side illuminated CMOS detector. The study examined CMOS detector output images at different stages of damage, including point damage, line damage, and complete failure, and correlated these with microscopic structural changes observed through optical and scanning electron microscopy. A finite element model was used to study the thermal–mechanical coupling effect during laser irradiation. The results indicated that at a laser energy density of 78.9 mJ/cm², localized melting occurs within photosensitive units in the epitaxial layer, manifesting as an irreversible white bright spot appearing in the detector output image (point damage). When the energy density is further increased to 241.9 mJ/cm², metal routings across multiple pixel units melt, resulting in horizontal and vertical black lines in the output image (line damage). Upon reaching 2005.4 mJ/cm², the entire sensor area failed to output any valid image due to thermal stress-induced delamination of the silicon dioxide insulation layer, with cracks propagating to the metal routing and epitaxial layers, ultimately causing structural deformation and device failure (complete failure).

A finite element simulation was conducted to analyze the thermal damage caused by a 532nm nanosecond pulsed laser on a CCD detector. A three-dimensional model was developed to study the temperature field variations within the detector. The simulation was centered on the laser-induced temporal progression of thermal damage in the CCD. Results showed that higher laser fluence led to increased heat accumulation, resulting in the expansion of the thermal damage area. Different thermal damage patterns were observed in the light sensor region and the light-shielded region. In the light sensor region, the melting of the silicon substrate expanded more in the transverse direction compared to the longitudinal direction with increasing laser fluence, while damage in the light-shielded region extended from the edges towards the center as laser fluence increased. These distinct damage patterns were attributed to different energy deposition patterns and structural differences between the light sensor region and the light-shielded region.