Chemical Mechanical Polishing (CMP) is a critical process in many industries where achieving superior surface quality through controlled material removal rates by using nano-abrasives is essential. This review examines key parameters of abrasives at the nanoscale, such as size, shape, aspect ratio, hardness, and surface modifications, through inorganic doping or organic molecule grafting and their influence on CMP performance. By analyzing recent studies, we explore how these parameters affect the tribological and chemical interactions during CMP and link these effects to the fundamental polishing mechanisms. Highlighting emerging trends, this work offers a roadmap for designing next-generation nano-abrasives that boost removal efficiency, enhance surface finish, and ensure process stability. Ultimately, controlling abrasive properties at the nanoscale is vital for advancing CMP technology toward more efficient, consistent, and high-quality results.

This study investigates hyperpolishing of Zerodur^® substrates via chemical-mechanical polishing (CMP) using silica (SiO₂) and ceria (CeO₂) nanoparticles as controlled nano-abrasives. A pre-polishing stress-mirror stage was combined with systematic use of nanoparticles of variable size to evaluate surface-state evolution via optical rugosimeter, HRSEM, cross-sectional HRTEM, and XPS. A set of hexagonal mirrors with a circumscribed diameter of 30 mm was polished for one hour with each nanoparticle type. All tested slurries significantly improved surface quality, with both the smallest (37 nm) and largest (209 nm) SiO₂ particles achieving similar final roughness, though larger particles showed a slight performance advantage that could be offset by longer polishing with smaller particles. CeO₂ nanoparticles (30 nm) produced even better process efficiency and surface finishes than 37 nm SiO₂, demonstrating higher chemical-mechanical polishing efficiency with CeO₂. Sequential polishing strategies, first with 209 nm SiO₂, then with 37 nm SiO₂ and 30 nm CeO₂, also enhanced surface quality, confirming trends from single-particle trials. One of the most effective protocols was adapted and scaled up to 135 mm Zerodur^® mirrors with spherical and plano geometries, representative of precision optical components. The strategic approach adopted to achieve a high-quality surface finish in a reduced processing time relies on the sequential use of nanoparticles acting as complementary nano-abrasives. Indeed, applying two hours of polishing with 209 nm SiO₂ followed by two hours with 37 nm SiO₂ yielded exceptional results, with area roughness (Sa) values of 1 Å for spherical and 0.9 Å for plano surfaces. These results demonstrate the capability of nanoparticle-assisted CMP to produce sub-nanometric surface finishes and offer a robust, scalable approach for high-end optical manufacturing.

The Habitable Worlds Observatory (HWO) will enable a transformative leap in the direct imaging and characterization of Earth-like exoplanets. For this, NASA is focusing on early investment in technology development prior to mission definition and actively seeking international partnerships earlier than for previous missions. The “R&D for Space-Based HCI in Europe” workshop, held in March 2024 at Paris Observatory, convened leading experts in high-contrast imaging (HCI) to discuss European expertise and explore potential strategies for European contributions to HWO. This paper synthesizes the discussions and outcomes of the workshop, highlighting Europe’s critical contributions to past and current HCI efforts, the synergies between ground- and space-based technologies, and the importance of laboratory testbeds and collaborative funding mechanisms. Key conclusions include the need for Europe to invest in technology development for areas such as deformable mirrors and advanced detectors, and establish or enhance laboratory facilities for system-level testing. Putting emphasis on the urgency of aligning with the timeline of HWO, the participants called on an open affirmation by the European Space Agency (ESA) that a European contribution to HWO is clearly anticipated, to signal national agencies and unlock funding opportunities at the national level. Based on the expertise demonstrated through R&D, Europe is poised to play a pivotal role in advancing global HCI capabilities, contributing to the characterization of temperate exoplanets and fostering innovation across domains.