Miniaturized self-powering systems that integrate both energy harvesters and energy storage units as the power sources are essential to realize maintenance-free wireless sensor networks, implantable medical devices, and active radio frequency identification systems. On-chip micro supercapacitors (MSCs) are promising candidates for energy storage in such systems by providing high power densities, fast charge/discharge rates, and long cycle life. Researchers have been improving the performances, especially energy and power densities, of MSCs in recent years. This paper reviews the fundamental working mechanisms and design considerations of on-chip MSCs with special emphasis on the advantages of 3-D configurations. Typical fabrication methods are summarized, and their effects on the device performance and system integration are analyzed. In particular, the power generation of micro energy harvesters and the power consumption of typical wireless micro systems are surveyed, providing the basic and targeting performance requirements of future MSCs that can be integrated with them.

Ultrathin transition metal carbides with high capacity, high surface area, and high conductivity are a promising family of materials for applications from energy storage to catalysis. However, large-scale, cost-effective, and precursor-free methods to prepare ultrathin carbides are lacking. Here, we demonstrate a direct pattern method to manufacture ultrathin carbides (MoC_x, WC_x, and CoC_x) on versatile substrates using a CO₂ laser. The laser-sculptured polycrystalline carbides (macroporous, ~10–20 nm wall thickness, ~10 nm crystallinity) show high energy storage capability, hierarchical porous structure, and higher thermal resilience than MXenes and other laser-ablated carbon materials. A flexible supercapacitor made of MoC_x demonstrates a wide temperature range (−50 to 300 °C). Furthermore, the sculptured microstructures endow the carbide network with enhanced visible light absorption, providing high solar energy harvesting efficiency (~72 %) for steam generation. The laser-based, scalable, resilient, and low-cost manufacturing process presents an approach for construction of carbides and their subsequent applications.