Light-based therapy is an emerging treatment for skin cancer, which has received increased attention due to its drug-free and non-invasive approach. However, the limitation of current light therapy methods is the inability for light to penetrate the skin and reach deep lesions. As such, we have developed a polylactic acid (PLA) microneedles array as a novel light transmission platform to perform in vitro evaluation regarding the effect of light therapy on skin cancer. For the first time, we designed and fabricated a microneedle array system with a height fixation device that can be installed in a cell culture dish and an LED array for blue light irradiation. The effect of the blue light combined with the microneedles on cell apoptosis was evaluated using B16F10 melanoma cells and analyzed by Hoechst staining. Our results demonstrate that blue light can be transmitted by microneedles to skin cells and effectively affect cell viability.

Dynamic gas lock (DGL) is one of the central components of contamination control for extreme ultraviolet lithography, and airflow efficiency is a key parameter. In this paper, the principle of the DGL and airflow efficiency is described at first, then a set of experiments is carried out on a self-developed DGL experimental device. The results of the experiment show that the pressures of the project optics box and the wafer chamber do not influence the airflow efficiency of DGL. In addition, the airflow efficiency increases slowly with the total airflow, and the gradient gradually diminishes. With an increase in the total airflow from 1 to 3 Pa m3/s, the argon efficiency increases from 0.247 to 0.260, while the nitrogen efficiency increases from 0.251 to 0.264, which shows that the efficiency of argon is slightly smaller than that of nitrogen under the same conditions. Within the interesting range of argon gas flow, the maximum difference between theory and experiment is less than 6%, which is acceptable in engineering. The theoretical calculation method in this paper can be used to evaluate the airflow efficiency for engineering applications. It is concluded that the airflow efficiency of the DGL is almost independent of the pressures of the upper and lower sides. However, the total airflow and the gas species will change the airflow efficiency.

Excimer lasers play a key role in deep ultraviolet lithography. To further study the voltage and energy features of the excimer laser and control it to work in a constant energy mode, a temporal convolutional neural network was designed to fabricate an excimer laser voltage–energy model. The proposed model uses the currently measured energy data to predict the subsequent output energy data. For the voltage–energy data that cannot be obtained, we simulated the initial energy data corresponding to the part of the voltage value based on the relationship between energy and voltage as the initial input of the model. The energy data of any voltage for the excimer laser at each moment were obtained. Finally, a continuous excimer laser voltage–energy model was established. The difference between the means of the measured and generated energy data is less than 0.5 mJ.

Particle-caused reticle defects contribute to a profound effect on the final integrated circuit (IC) yield, posing a significant technological challenge in extreme ultraviolet (EUV) lithography. This study employs the direct simulation Monte Carlo method to simulate the rarefied flow field within the EUV scanner reticle mini environment, investigating the influence of the rarefied flow field on particle behavior based on a bidirectional coupled gas-solid two-phase model. Simulation results demonstrate that the flow field induces the formation of a “particle inhibition zone” at high flow rates. Consequently, the “stopping distance” of particles released from the reticle masking blade surface remains consistently around 4 mm, and the residual rate of small particles (100 nm) is only 1.4%. The flow field control within the EUV scanner reticle mini environment can effectively mitigates the risk of particle-caused damage to the reticle surface while maintaining internal cleanliness.

A two-dimensional type-II MoSi₂As₄/MoGe₂N₄ van der Waals heterostructure with a high power conversion efficiency of 22.09% was designed, making it a potential candidate material in the field of photovoltaics.