Crystalline defects such as oxygen vacancies have been studied little by electron paramagnetic resonance (EPR) spectroscopy for silicate-based luminescent materials. In this study, lutetium oxyorthosilicate powders were prepared by the sol–gel method, using TEOS (silicon source) and rare earth salts as precursors. The cross-linking agent, Glymo, contributed silicon atoms to the precursor solution in all systems. The addition of Glymo to Lu₂SiO₅, Lu₂SiO₅:Eu and Lu₂SiO₅:Eu/Yb influenced the morphology and chemical structure of the powders, leading to Lu₂Si₂O₇ formation. The crystalline defects in the lutetium silicate systems were investigated by EPR spectroscopy, and several defects related to oxygen were identified, as well as impurities from the precursors. Photoluminescence emission spectra revealed Eu³⁺ transitions between ⁵D₀ → ⁷F₀, ⁵D₀ → ⁷F₁ and ⁵D₀ → ⁷F₂ under 258 nm excitation, in addition to oxygen vacancy emissions between 500 and 550 nm. Oxygen vacancies were identified and confirmed by correlating EPR and photoluminescence studies.