Microelectronic packaging is crucial for protecting, powering, and interconnecting semiconductor chips, playing a critical role in the functionality and reliability of electronic devices. With the growth in complexity and miniaturization of these products, the implementation of efficient inspection techniques becomes crucial in preventing failures that may result in device malfunctions. This review paper examines the progress made in utilizing Scanning Acoustic Microscopy (SAM) to assess the structural integrity of microelectronic systems within the broader field of Nondestructive Evaluation/Testing (NDE/T) methods. With an exclusive emphasis on SAM, we point out SAM technological advancements in multi-die stacking, Through Silicon Vias (TSV), and hybrid bonding inspection that improve inspection sensitivity and resolution required to be prepared for upcoming challenges accompanying 3D- and heterogeneous integration architectures. Some of these approaches compromise the depth of inspection for the benefit of lateral resolution, while others do not sacrifice the in-depth range of evaluation. These developments are of the utmost importance in addressing the substantial obstacles associated with examining microelectronic packages, facilitating the early detection of potential failures, and enhancing the reliability and robustness of semiconductor devices. Furthermore, our discussion consists of the fundamental principles and practical approaches of SAM. It also examines recent investigations that integrate SAM with machine learning concepts and the application of deep learning models in order to automate defect detection and characterization, thus substantially augmenting the efficiency of microelectronic package assessments.
28 April 2023 in Proceedings of the Institution of Mechanical Engineers, Part C: Journal of Mechanical Engineering Science
This paper investigates the relation between acoustic emission events and the corresponding behavior of the specimens after damage under tensile loading. Tensile strengths of carbon/glass fiber epoxy composites subjected to impact damage were evaluated experimentally. The variations of amplitude, energy, and dominant frequencies of the AE events were studied to investigate the post-impact behavior of specimens. Different layers (6, 12-ply) and fiber materials were assessed, and their effects were considered. Waveform patterns and frequency domain analyses were also utilized to evaluate the damage severity. This practical method can be used as an advanced and straightforward approach to estimate either the value of the damage or residual strength subsequent to impact in laminated composites. It was proved that the impact damage led to dropping residual strength, especially in carbon/epoxy specimens, since they are sensitive to impact.
Ultrasound–assisted additive manufacturing forms bonds through rapid interfacial events that are difficult to observe in situ, particularly because the deposition tool moves continuously. This study presents an energy–based acoustic framework for detecting and timing these interfacial events, demonstrated on the Resonant–Assisted Deposition (RAD) process. Rather than measuring absolute energy, the method treats the signal power of each channel as a relative indicator of acoustic energy and tracks how wave propagation is altered in structure–borne and airborne pathways, recorded by two AE sensors on the deposition head and substrate, and an airborne microphone. Because the interface acts on all pathways at once, its activity appears as a common–mode variation of the head and substrate signal powers, distinct from the opposing trade–off seen during free tool motion, and this signature locates the interfacial activities within deposition cycles. Two time–domain features segment the window: the Interfacial Slipping Duration (ISD), associated with the slip stage, and the Interfacial Consolidation Duration (ICD), the subsequent bond formation stages; together they give the interfacial–activity duration . The measured ISD is consistent with an independently reported slip stage thermal response, and the same signal–derived windows confine the time–frequency analysis to the interval where ultra–harmonic interfacial content appears. Across controlled changes in excitation frequency and substrate temperature, the features remain extractable and respond in distinguishable ways, indicating repeatability and sensitivity. The method provides a physically interpretable, fixed–sensor basis for characterizing the timing of interfacial events in a moving–tool process, intended for in–situ process monitoring.
12 November 2026 in Mechanical Systems and Signal Processing