Precision measurement technology and instruments are the basis for high-quality development in modern industry. With the specialization of supporting facilities, ultra-precision motion guidance has become a core technology to achieve ultra-precision measurement. Aerostatic bearings have the advantages of low friction and high precision, and are gradually playing an irreplaceable role in precision measurement and instruments. This paper summarizes and puts forward two contradictions for improving the loading capacity of aerostatic bearings, and investigates how to solve them via structural design. This paper analyzes the characteristics of the engineering calculation method, the gauge pressure ratio method, the gas resistance calculation method, and the AFVM (adaptive finite volume method) proposed. Finally, this paper summarizes the application scope of each method, gives solutions to the core problems, and outlines the developing trends.

This paper proposes a calibration method for angular positioning deviation of a high-precision rotary table based on the laser tracer multi-station measurement system. The algorithm error of the calibration method for angular positioning deviation of a high-precision rotary table based on the laser tracer multi-station measurement system was mainly discussed. During the experiments, the laser tracer was fixed on the work surface of the rotary table, and the rotary was fixed on the work surface of the coordinate measurement machine (CMM). The rotary table was rotated with the same angular interval. In this case, an optimization method for calculating the coordinates of a laser tracer station by using Levenberg–Marquardt algorithm and singular value decomposition transform was proposed. Then, the angular positioning deviation of the rotary table was calibrated by an established geometric relationship model between the coordinates of laser tracer stations and the rotation angle of the rotary table. The angular positioning deviation of the high-precision rotary table was as low as ±0.9″, and the error of the calibration method was ±0.4″. The experimental results proved the feasibility of the proposed calibration method. The calibration method proposed in this paper is suitable for the case that the rotary table is not linked with the CMM, especially for large high-precision rotary tables.

Line laser measurement, as a typical method of laser triangulation, makes the acquisition of 3D tooth-surface data more accurate, efficient, and informative. Thus, a line laser 3D measurement model of gears is established, and a specialized polyhedral artifact with specific geometric features is invented to determine the pose parameters of the line laser sensor in measuring space. Based on this, a single-spindle gear-measuring instrument is developed and a series of experimental studies are conducted for gears with different module and flank directions in this instrument, including profile deviation, helix deviation, pitch deviation, topological deviation, etc. A comparative experiment with traditional contact measurement methods validates the correctness of the methods mentioned in this paper for the accurate evaluation of tested gears. In further research, the mining and utilization of big data obtained from the line laser 3D measurement of gears will be an important topic.

Ultra-precision measurement and manufacturing need high-precision machines, just as a photolithography machine needs air bearings. In gas lubrication, the use of compound restrictors with recesses has been widely proven to be an effective method to improve stiffness, which directly affects the accuracy of the machine. However, determination of the structural parameters of recesses is lacking in theoretical models. This paper has established a mechanical property model for a small-scale guideway, which can respond to the variation in force caused by micron-level changes in the recesses’ depth. To meet the requirements of high positioning accuracy and movement accuracy, this paper puts forward a high-stiffness guideway without an air tube. In order to improve rotational stiffness and determine the structural parameters of recesses, this paper found a guideway with the optimal gradient depth of recesses. Both AFVM (adaptive finite volume method) research and experimental results show that the gradient depth of recesses could significantly improve the rotational stiffness of guideways without air tubes.