Piezoelectric actuators are widely used in micro- and nano-manufacturing and precision machining due to their superior performance. However, there are complex hysteresis nonlinear phenomena in piezoelectric actuators. In particular, the inherent hysteresis can be affected by the input frequency, and it sometimes exhibits asymmetrical characteristic. The existing dynamic hysteresis model is inaccurate in describing hysteresis of piezoelectric actuators at high frequency. In this paper, a Dynamic Delay Prandtl–Ishlinskii (DDPI) model is proposed to describe the asymmetrical and dynamic characteristics of piezoelectric actuators. First, the shape of the Delay Play operator is discussed under two delay coefficients. Then, the accuracy of the DDPI model is verified by experiments. Next, to compensate the asymmetrical and dynamic hysteresis, the compensator is designed based on the Inverse Dynamic Delay Prandtl–Ishlinskii (IDDPI) model. The effectiveness of the inverse compensator was verified by experiments. The results show that the DDPI model can accurately describe the asymmetrical and dynamic hysteresis, and the compensator can effectively suppress the hysteresis of the piezoelectric actuator. This research will be beneficial to extend the application of piezoelectric actuators.

Because of fast frequency response, high stiffness, and displacement resolution, the piezoelectric actuators (PEAs) are widely used in micro/nano driving field. However, the hysteresis nonlinearity behavior of the PEAs affects seriously the further improvement of manufacturing accuracy. In this paper, we focus on the modeling of asymmetric hysteresis behavior and compensation of PEAs. First, a polynomial-modified Prandtl–Ishlinskii (PMPI) model is proposed for the asymmetric hysteresis behavior. Compared with classical Prandtl–Ishlinskii (PI) model, the PMPI model can be used to describe both symmetric and asymmetric hysteresis. Then, the congruency property of PMPI model is analyzed and verified. Next, based on the PMPI model, the inverse model (I-M) compensator is designed for hysteresis compensation. The stability of the I-M compensator is analyzed. Finally, the simulation and experiment are carried out to verify the accuracy of the PMPI model and the I-M compensator. The results implied that the PMPI model can effectively describe the asymmetric hysteresis, and the I-M compensator can well suppress the hysteresis characteristics of PEAs.

Precision spherical joints are commonly employed as multiple degree-of-freedom (DOF) mechanical hinges in many engineering applications, e.g., robots and parallel manipulators. Real-time and precise measurement of the rotational angles of spherical joints is not only beneficial to the real-time and closed-loop control of mechanical transmission systems, but also is of great significance in the prediction and compensation of their motion errors. This work presents a novel approach for rotational angle measurement of spherical joints with a capacitive sensor. First, the 3-DOF angular motions of a spherical joint were analyzed. Then, the structure of the proposed capacitive sensor was presented, and the mathematical model for the rotational angles of a spherical joint and the capacitance of the capacitors was deduced. Finally, the capacitance values of the capacitors at different rotations were simulated using Ansoft Maxwell software. The simulation results show that the variation in the simulated capacitance values of the capacitors is similar to that of the theoretical values, suggesting the feasibility and effectiveness of the proposed capacitive detection method for rotational angles of spherical joints.

Due to the flexible and compact structures, spherical joints are widely used in parallel manipulators and industrial robots. Real-time detection of the clearance between the ball and the socket in spherical joints is beneficial to compensate motion errors of mechanical systems and improve their transmission accuracy. This work proposes an improved capacitive sensor for detecting the micro-clearance of spherical joints. First, the structure of the capacitive sensor is proposed. Then, the mathematical model for the differential capacitance of the sensor and the eccentric micro-displacement of the ball is deduced. Finally, the capacitance values of the capacitive sensor are simulated with Ansoft Maxwell. The simulated values of the differential capacitances at different eccentric displacements agree well with the theoretical ones, indicating the feasibility of the proposed detection method. In addition, the simulated results show that the proposed capacitive sensor could effectively reduce the capacitive fringe effect, improving the measurement accuracy.

Piezoelectric actuators are widely used in the field of micro- and nanopositioning due to their high frequency response, high stiffness, and high resolution. However, piezoelectric actuators have hysteresis nonlinearity, which severely affects their positioning accuracy. As the driving frequency increases, the performance of piezoelectric actuators further degrades. In addition, the impact of force on piezoelectric actuators cannot be ignored in practical applications. Dynamic hysteresis with force-voltage coupling makes the hysteresis phenomenon more complicated when force and driving voltage are both applied to the piezoelectric actuator. Existing hysteresis models are complicated, or inaccurate in describing dynamic hysteresis with force-voltage coupling. To solve this problem, a force-voltage-coupled Prandtl–Ishlinskii (FVPI) model is proposed in this paper. First, the influence of driving frequency and dynamic force on the output displacement of the piezoelectric actuators are analyzed. Then, the accuracy of the FVPI model is verified through experiments. Finally, a force integrated direct inverse (F-DI) compensator based on the FVPI model is designed. The experimental results from this study show that the F-DI compensator can effectively suppress dynamic hysteresis with force-voltage coupling of piezoelectric actuators. This model can improve the positioning accuracy of piezoelectric actuators, thereby improving the working accuracy of the micro- or nano-operating system.