Dr. Yong Ruan received his B.Sc. degree from Xi’dian University, Xi’an, China, in 1998, and completed his Master’s and Ph.D. at Peking University, Beijing, China. He is currently an associate professor with the Department of Precision Instruments at Tsinghua University, Beijing, China, where he is involved in teaching, research, and industrial consultation. His current research interests include nano-/microdevices and fabrication technology, the development of MEMS processes by silicon surface/bulk micromachining, and chip-scale atomic devices and MEMS relay.
Research Keywords & Expertise
MEMS/NEMS
Silicon based surface/...
MEMS Relay
MEMS pressure sensor
Harsh environment MEMS...
Chip-scale atomic devi...
Fingerprints
14%
MEMS Relay
Short Biography
Dr. Yong Ruan received his B.Sc. degree from Xi’dian University, Xi’an, China, in 1998, and completed his Master’s and Ph.D. at Peking University, Beijing, China. He is currently an associate professor with the Department of Precision Instruments at Tsinghua University, Beijing, China, where he is involved in teaching, research, and industrial consultation. His current research interests include nano-/microdevices and fabrication technology, the development of MEMS processes by silicon surface/bulk micromachining, and chip-scale atomic devices and MEMS relay.
Advance your academic career, collaborate globally, and expand your network—
join now
!
Well done!
