Polyurethane foam (PUF) pads are widely used in semiconductor manufacturing, particularly for chemical mechanical polishing (CMP). This study prepares PUF composites with microcrystalline cellulose (MCC) and nanocrystalline cellulose (NCC) to improve CMP performance. MCC and NCC were characterized using scanning electron microscopy (SEM) and X-ray diffraction (XRD), showing average diameters of 129.7 ± 30.9 nm for MCC and 22.2 ± 6.7 nm for NCC, both with high crystallinity (ca. 89%). Prior to preparing composites, the study on the influence of the postbaked step on the PUF was monitored through Fourier-transform infrared spectroscopy (FTIR). After that, PUF was incorporated with MCC/NCC to afford two catalogs of polyurethane foam composites (i.e., PUFC-M and PUFC-N). These PUFCs were examined for their thermal and surface properties using a differential scanning calorimeter (DSC), thermogravimetric analysis (TGA), dynamic mechanical analyzer (DMA), and water contact angle (WCA) measurements. T_gs showed only slight changes but a notable increase in the 10% weight loss temperature (T_d10%) for PUFCs, rising from 277 °C for PUF to about 298 °C for PUFCs. The value of Tan δ dropped by up to 11%, indicating improved elasticity. Afterward, tensile and abrasion tests were conducted, and we acquired significant enhancements in the abrasion performance (e.g., from 1.04 mm/h for the PUF to 0.76 mm/h for a PUFC-N) of the PUFCs. Eventually, we prepared high-performance PUFCs and demonstrated their capability toward the practical CMP process.

Wastewater containing heavy metals and dyes poses serious environmental risks. This study developed a multifunctional composite by coating polyurethane foam (PUF) with milled activated carbon (mAC) and a zirconium-based metal–organic framework (Zr-MOF) for the simultaneous removal of hexavalent chromium (Cr(VI)) and Congo red (CR). The composite was synthesized using a hydrothermal method to grow Zr-MOF on the surface. The SEM analysis confirmed the successful incorporation of mAC and surface modification with Zr-MOF, which resulted in increased surface roughness and porous morphology. XRD and FTIR confirmed the presence of organic ligands connected to the metal structure and the functional groups of each component in composite materials. The optimum conditions for Zr-MOF/mAC/PUF adsorption (nearly 100% removal) in the binary Cr(VI)/CR solution (50 mg/L each) were 25 °C, pH 9, and 150 rpm for 24 h. The Zr-MOF/mAC/PUF was hydrophilic with a swelling ratio of 2.64 g/g. The thermodynamic investigation of Zr-MOF/mAC/PUF resulted in 141.6218 kJ/mol for Cr(VI) and 166.111 kJ/mol for CR of ΔH° (rapid adsorption), negative ΔG° (spontaneous adsorption), a high positive value of ΔS° (disorder structure) and low activation energy (approximately 2.5 to 2.8 kJ/mol). After analyzing the isotherm and reaction kinetics, the possible mechanism could be endothermic physicochemical adsorption and pseudo-second-order kinetic behavior, with electrostatic attraction and diffusion control. The study of 6-times-reused Zr-MOF/mAC/PUF adsorption identified as a decrease of 7.55 percentage point without changing notable morphology and functional groups, based on SEM and FTIR.