The microvalve is one of the most important components in microfluidics. With decades of development, the microvalve has been widely used in many industries such as life science, chemical engineering, chip, and so forth. This paper presents a comprehensive review of the progress made over the past years about microvalves based on different actuation mechanisms. According to driving sources, plenty of actuation mechanisms are developed and adopted in microvalves, including electricity, magnetism, gas, material and creature, surface acoustic wave, and so on. Although there are currently a variety of microvalves, problems such as leakage, low precision, poor reliability, high energy consumption, and high cost still exist. Problems deserving to be further addressed are suggested, aimed at materials, fabrication methods, controlling performances, flow characteristics, and applications.

目的 微通道以其效率高、 体积小等特点在许多领域有着越来越广泛的应用。 特斯拉阀是一种没有运动部件的止回阀, 在微流动控制领域有着明显的优势。 大量研究表明, 将纳米流体运用到微尺度通道中可明显提高换热效率。 本文将二者结合, 研究Al2O3-水纳米流体在微尺度特斯拉阀中的流动特性, 为微尺度特斯拉阀以及纳米流体的进一步研究提供参考。