For vibration and displacement sensors, robustness is one of the key requirements. Optical measurement concepts are among the most promising possibilities to achieve it. The presented microoptoelectromechanical system sensor modulates a light flux by means of two congruently placed aperture gratings: one etched into a seismic mass and the other fixed to the sensor package. Commercially available LED and photodetector components at the top and bottom of the sandwich structure generate and detect this modulated light flux and allow for a cost-effective implementation. The prototype used for experimental verification is actuated by inertial forces and exhibits a high sensitivity of 0.85 mV/nm for displacements of the seismic mass and a corresponding noise level of about 14 pm/√Hz. This sensitivity and noise level can be further improved, paving the way for small, lightweight, robust, and high-precision displacement sensors for a large variety of applications.

Due to the necessary transition to renewable energy, the transport of electricity over long distances will become increasingly important, since the sites of sustainable electricity generation, such as wind or solar power parks, and the place of consumption can be very far apart. Currently, electricity is mainly transported via overhead AC lines. However, studies have shown that for long distances, transport via DC offers decisive advantages. To make optimal use of the existing route infrastructure, simultaneous AC and DC, or hybrid transmission, should be employed. The resulting electric field strengths must not exceed legally prescribed thresholds to avoid potentially harmful effects on humans and the environment. However, accurate quantification of the resulting electric fields is a major challenge in this context, as they can be easily distorted (e.g. by the measurement equipment itself). Nonetheless knowledge of the undisturbed field strengths from DC up to several multiples of the fundamental frequency of the power-grid (up to 1 kHz) is required to ensure compliance with the thresholds. Both AC and DC electric fields can result in the generation of corona ions in the vicinity of the line. In the case of pure AC fields, the corona ions generated typically recombine in the immediate vicinity of the line and, therefore, have no influence on the field measurement further away. Unfortunately, this assumption does not hold for DC fields and hybrid fields, where corona ions can be transported far away from the line (e.g. by wind), and potentially interact with the measurement equipment yielding incorrect measurement results. This review will provide a comprehensive overview of the current state-of-the-art technologies and methods which have been developed to address the problems of measuring the electric field near hybrid power lines.

This paper presents encouraging results of a novel optoelectronic conversion method for relative displacement. An optical modulator responding to acceleration and gravitation is used for characterization. The Si microelectromechanical system (MEMS) component comprise a spring suspended, in-plane oscillating mass carrying an array of optical apertures. Light flux modulation is achieved with a second array of complementary apertures that is fixed to the Si frame. The investigated device comprises a sandwich structure of an SMD LED, the MEMS aperture gratings, and a phototransistor. Relative displacements of the gratings generate a modulation of the LED light flux that is detected by the phototransistor. Depending on the aperture design, the relative displacement may extend over several tens of microns maintaining a sub-nm resolution. Thus, no closed-loop position control system is required, resulting in minimum complexity and energy consumption of the MEMS component. This setup simplifies the manufacturing process as much as possible, which is one of the significant advantages of the sensor principle. Furthermore, the presented prototype exhibits a promising high sensitivity of 60 nA/nm for displacement, featuring a noise level of about 8 pm/√Hz.

A passive thermal micro-actuator with large area specific work and large displacement, fabricated of electroplated nickel on a silicon substrate is presented. The actuation relies on the thermal expansion of beams in a V-shaped geometry. Two V-shaped beam stacks are aligned opposite to each other and are coupled to a lever transmission. The actuator exhibits low energy losses due to the deformation of the structure and can efficiently convert the thermally induced elastic energy into mechanical work. An analytical model considers these thermally induced mechanical energies and the energy losses caused by the deformation of the material. The calculated deflections are compared with the measured ones and results of finite-element method simulations. The presented actuator operates completely passive, relies only on temperature changes of the surrounding environment, and exhibits a measured temperature-dependent linear deflection coefficient of 1.48 μm/K with a simulated blocking force of 57 μN/K. The structure occupies an area of 2135 × 1831 μm ² and the area specific work is calculated to be 21.7 μJ/K ² /m ² , beating state of the art thermal actuators. As proof-of-concept, a passive micro-electro-mechanical systems temperature threshold sensor is fabricated, featuring the actuator and a bistable beam that switches between two stable positions when a specific threshold temperature is exceeded.