Metal oxides (MOx) are a well-established material for gas sensing. MOx-based gas sensors are sensitive to a wide variety of gases. Furthermore, these materials can be applied for the fabrication of low-cost and -power consumption devices in mass production. The market of carbon dioxide (CO ${}_2$ ) gas sensors is mainly dominated by infra-red (IR)-based gas sensors. Only a few MOx materials show a sensitivity to CO ${}_2$ and so far, none of these materials have been integrated on CMOS platforms suitable for mass production. In this work, we report a cupric oxide (CuO) thin film-based gas sensor functionalized with gold (Au) nanoparticles, which exhibits exceptional sensitivity to CO ${}_2$ . The CuO-based gas sensors are fabricated by electron beam lithography, thermal evaporation and lift-off process to form patterned copper (Cu) structures. These structures are thermally oxidized to form a continuous CuO film. Gold nanoparticles are drop-coated on the CuO thin films to enhance their sensitivity towards CO ${}_2$ . The CuO thin films fabricated by this method are already sensitive to CO ${}_2$ ; however, the functionalization of the CuO film strongly increases the sensitivity of the base material. Compared to the pristine CuO thin film the Au functionalized CuO film shows at equal operation temperatures (300 ${}^{\circ }$ C) an increase of sensitivity towards the same gas concentration (e.g., 2000 ppm CO ${}_2$ ) by a factor of 13. The process flow used to fabricate Au functionalized CuO gas sensors can be applied on CMOS platforms in specific post processing steps.

Chemical sensors, relying on changes in the electrical conductance of a gas-sensitive material due to the surrounding gas, typically react with multiple target gases and the resulting response is not specific for a certain analyte species. The purpose of this study was the development of a multi-sensor platform for systematic screening of gas-sensitive nanomaterials. We have developed a specific Si-based platform chip, which integrates a total of 16 sensor structures. Along with a newly developed measurement setup, this multi-sensor platform enables simultaneous performance characterization of up to 16 different sensor materials in parallel in an automated gas measurement setup. In this study, we chose the well-established ultrathin SnO₂ films as base material. In order to screen the sensor performance towards type and areal density of nanoparticles on the SnO₂ films, the films are functionalized by ESJET printing Au-, NiPt-, and Pd-nanoparticle solutions with five different concentrations. The functionalized sensors have been tested toward the target gases: carbon monoxide and a specific hydrogen carbon gas mixture of acetylene, ethane, ethne, and propene. The measurements have been performed in three different humidity conditions (25%, 50% and 75% r.h.). We have found that all investigated types of NPs (except Pd) increase the responses of the sensors towards CO and HC_mix and reach a maximum for an NP type specific concentration.

Chemical sensors, relying on electrical conductance changes in a gas-sensitive material due to the surrounding gas, have the (dis-)advantage of reacting with multiple target gases and humidity. In this work, we report CMOS-integrated SnO₂ thin film-based gas sensors, which are functionalized with mono-, bi-, and trimetallic nanoparticles (NPs) to optimize the sensor performance. The spray pyrolysis technology was used to deposit the metal oxide sensing layer on top of a CMOS-fabricated micro-hotplate (µhp), and magnetron sputtering inert-gas condensation was employed to functionalize the sensing layer with metallic NPs, Ag-, Pd-, and Ru-NPs, and all combinations thereof were used as catalysts to improve the sensor response to carbon monoxide and to suppress the cross-sensitivity toward humidity. The focus of this work is the detection of toxic carbon monoxide and a specific hydrocarbon mixture (HC_mix) in a concentration range of 5–50 ppm at different temperatures and humidity levels. The use of CMOS chips ensures low-power, integrated sensors, ready to apply in cell phones, watches, etc., for air quality-monitoring purposes.

Metal oxide multi-nanowire-based chemical gas sensors were manufactured by a fast and simple transfer printing technology. A two-step method employing spray pyrolysis deposition and a thermal annealing process was used for SnO ${}_2$ nanowires fabrication. A polydimethylsiloxane stamp was used to transfer the SnO ${}_2$ nanowires on two different gas sensing devices—Si-based substrates and microhotplate-based platform chips. Both contained a metallic inter-digital electrode structure (IDES), on which the SnO ${}_2$ nanowires were transferred for realization of multi-NW gas sensor devices. The gas sensor devices show a very high response towards H ${}_2$ S down to the 10 ppb range. Furthermore, a good response towards CO has been achieved, where in particular the microhotplate-based devices exhibit almost no cross sensitivity to humidity.

Integration of metal oxide nanowires in metal oxide gas sensors enables a new generation of gas sensor devices, with increased sensitivity and selectivity. For reproducible and stable performance of next generation sensors, the electric properties of integrated nanowires have to be well understood, since the detection principle of metal oxide gas sensors is based on the change in electrical conductivity during gas exposure. We study two different types of nanowires that show promising properties for gas sensor applications with a Scanning Probe Microscope—Scanning Electron Microscope combination. Electron Beam Induced Current and Kelvin Probe Force Microscopy measurements with a lateral resolution in the nanometer regime are performed. Our work offers new insights into the dependence of the nanowire work function on its composition and size, and into the local interaction between electron beam and semiconductor nanowires.