Although two-dimensional (2D) layered molybdenum disulfide (MoS₂) has widespread electrical applications in catalysis, energy storage, and photodetection, there are few reports available regarding sputtered MoS₂ for piezoresistive sensors. In this research, we found that the resistance of magnetron sputtered MoS₂ on a flexible substrate changed significantly and regularly when pressure was applied. Scanning electron microscope (SEM) and atomic force microscope (AFM) images revealed an MoS₂ micro-grain-like structure comprising nano-scale particles with grooves between the particles. Chemical characterization data confirmed the successful growth of amorphous MoS₂ on a polydimethylsiloxane (PDMS) substrate. A micro-thickness film flexible sensor was designed and fabricated. In particular, the sensor with a 1.5 μm thick polydimethylsiloxane (PDMS) substrate exhibited the best resistance performance, displaying a maximum ΔR/R of 70.39 with a piezoresistive coefficient as high as 866.89 MPa⁻¹ while the pressure was 0.46 MPa. A proposed flexible pressure sensor based on an MoS₂ film was also successfully used as a wearable pressure sensor to measure plantar pressure and demonstrated good repeatability. The results showed that the thin film pressure sensor had good piezoresistive performance and high sensitivity.

Flexible pressure sensors are widely used in different fields, especially in human motion, robot monitoring and medical treatment. Herein, a flexible pressure sensor consists of the flat top plate, and the microstructured bottom plate is developed. Both plates are made of polydimethylsiloxane (PDMS) by molding from the 3D printed template. The contact surfaces of the top and bottom plates are coated with a mixture of poly (3,4-ethylenedioxythiophene) poly (styrene sulfonate) (PEDOT:PSS) and polyurethane dispersion (PUD) as stretchable film electrodes with carbon nanotubes on the electrode surface. By employing 3D printing technology, using digital light processing (DLP), the fabrication of the sensor is low-cost and fast. The sensor models with different microstructures are first analyzed by the Finite Element Method (FEM), and then the models are fabricated and tested. The sensor with 5 × 5 hemispheres has a sensitivity of 3.54 × 10⁻³ S/kPa in the range of 0–22.2 kPa. The zero-temperature coefficient is −0.0064%FS/°C. The durability test is carried out for 2000 cycles, and it remains stable during the whole test. This work represents progress in flexible pressure sensing and demonstrates the advantages of 3D printing technology in sensor processing.

A 3D printed force sensor with a composite structure developed by combining digital light processing (DLP) based printing and inkjet printing technologies is described in this paper. The sensor has cost effectiveness and time-saving advantages compared to the traditional sensor manufacturing process. During this work, the substrate of the force sensor was printed by a DLP based 3D printer using a transparent high-temperature resin, and the strain gauge of the force sensor was inkjet printed using poly(3,4-ethylenedioxythiophene) polystyrene sulfonate (PEDOT/PSS) conductive ink. Finite element (FE) simulation was conducted to find the print origin of the strain gauge. The relationship between the mechanical properties of the post-cured resin and the curing time was investigated and the resistance of the printed strain gauges was characterized to optimize process parameters. Afterward, the force sensor was characterized. Experimental results show that the sensitivity of the sensor is 2.92% N⁻¹ and the linearity error is 3.1485% full scale (FS) within the range from 0 mN–160 mN, and the effective gauge factor of the strain gauge is about 0.98. The resistance drifting is less than 0.004 kΩ within an hour. These figures prove that the device can perform as a force sensor and 3D printing technology may have great applied potential in sensor fabrication.

In this paper, we present a fully printed accelerometer with a piezoresistive carbon paste-based strain gauge printed on its surface, which can be manufactured at low cost and with high efficiency. This accelerometer is composed of two parts: a sensor substrate made from high-temperature resin, which is printed by a 3D printer based on stereolithography apparatus (SLA), and a carbon paste-based strain gauge fabricated by screen-printing technology and by direct ink writing (DIW) technology for the purposes of comparison and optimization. First, the structural design, theoretical analysis, simulation analysis of the accelerometer, and analyses of the conductive mechanism and the piezoresistive mechanism of the carbon paste-based strain gauge were carried out. Then the proposed accelerometer was fabricated by a combination of different printing technologies and the curing conditions of the carbon paste were investigated. After that, the accelerometers with the screen-printed strain gauge and DIW strain gauge were characterized. The results show that the printing precision of the screen-printing process on the sensor substrate is higher than the DIW process, and both accelerometers can perform acceleration measurement. Also, this kind of accelerometer can be used in the field of measuring body motion. All these findings prove that 3D printing technology is a significant method for sensor fabrication and verification.

A 3D-printed micro-pressure sensor with high sensitivity is developed in this paper. It is a fully printed pressure sensor fabricated using a combination of digital light processing (DLP)-based printing and screen-printing technologies, with the advantages of high manufacturing efficiency and low cost. The pressure sensor consists of a sensor substrate with a circular diaphragm and a Wheatstone bridge on the surface. First, the pressure sensor was theoretically analyzed and then verified using the finite element method (FEM). During fabrication, the sensor substrate was made from a transparent high-temperature resin, which was printed by a DLP-based 3D printer. The resistors and leads of the Wheatstone bridge were made from carbon paste and silver paste, respectively, and printed by screen-printing technology. Then, the resistors were characterized to find the gauge factor and the print consistency between different resistors. Next, the experimental setup was established for the characterization of the pressure sensor. Three loops of pressurization and depressurization from 0 kPa to 2.4 kPa were applied to the pressure sensor continuously, and the output voltage was recorded. The experimental results show that the gauge factor of the carbon resistor is 17.01 ± 1.85, the sensitivity of the sensor is 4.5522 mV/kPa/5 V, the linearity error is 2.077% FS, the hysteresis error is 6.327% FS and the repeatability error is 5.708% FS. Also, it is very convenient to obtain pressure sensors with different sensitivities and measurement ranges by changing the thickness of the circular diaphragm. All these results prove that the proposed sensor provides a low cost and high sensitivity approach for micro-pressure measurement, and that 3D printing can be applied to the production of personalized sensors.