The combination of nonlinear and integrated photonics enables Kerr frequency comb generation in stable chip-based micro-resonators. Such a comb system will revolutionize applications, including multi-wavelength lasers, metrology, and spectroscopy. Aluminum gallium arsenide (AlGaAs) exhibits very high material nonlinearity and low nonlinear loss. However, difficulties in device processing and low device effective nonlinearity made Kerr frequency comb generation elusive. Here, we demonstrate AlGaAs-on-insulator as a nonlinear platform at telecom wavelengths with an ultra-high device nonlinearity. We show high-quality-factor () micro-resonators where optical parametric oscillations are achieved with milliwatt-level pump threshold powers, which paves the way for on-chip pumped comb generation.
Silicon photonics is one of the most prominent technology platforms for integrated photonics and can support a wide variety of applications. As we move towards a mature industrial core technology, we present the integration of silicon nitride (SiN) material to extend the capabilities of our silicon photonics platform. Depending on the application being targeted, we have developed several integration strategies for the incorporation of SiN. We present these processes, as well as key components for dedicated applications. In particular, we present the use of SiN for athermal multiplexing in optical transceivers for datacom applications, the nonlinear generation of frequency combs in SiN micro-resonators for ultra-high data rate transmission, spectroscopy or metrology applications and the use of SiN to realize optical phased arrays in the 800–1000 nm wavelength range for Light Detection And Ranging (LIDAR) applications. These functionalities are demonstrated using a 200 mm complementary metal-oxide-semiconductor (CMOS)-compatible pilot line, showing the versatility and scalability of the Si-SiN platform.
A novel and simple bandwidth and wavelength-tunable optical bandpass filter based on silicon microrings in a Mach-Zehnder interferometer (MZI) structure is proposed and demonstrated. In this filter design, the drop transmissions of two microring resonators are combined to provide the desired tunability. A detailed analysis and the design of the device are presented. The shape factor and extinction ratio of the filter are optimized by thermally controlling the phase difference between the two arms of the MZI. Simultaneous bandwidth and wavelength tunability with in-band ripple control is demonstrated by thermally tuning the resonance offset between the two microring resonators.