Zhuqing Wang

Dr. Zhuqing Wang

orcid

Research Focus & Metrics

Academic Career Length

21Years (2006-Present)

(Calculated once Scilit publication data is synced: current year − year of first publication + 1)

Representative Publications

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20 May 2019 in Microsystems & Nanoengineering
Verified
Journal Article
Open access
PDF file
ZAZhonglie An
Zhonglie An
JLJinhua Li
Jinhua Li
AKAkio Kikuchi
Akio Kikuchi
ZWZhuqing Wang
Zhuqing Wang
YJYonggang Jiang
Yonggang Jiang
TOTakahito Ono
Takahito Ono
High-density integration technologies with copper (Cu) through-silicon via (TSV) have emerged as viable alternatives for achieving the requisite integration densities for the portable electronics and micro-electro-mechanical systems (MEMSs) package. However, significant thermo-mechanical stresses can be introduced in integrated structures during the manufacturing process due to mismatches of thermal expansion and the mechanical properties between Cu and silicon (Si). The high-density integration demands an interconnection material with a strong mechanical strength and small thermal expansion mismatch. In this study, a novel electroplating method is developed for the synthesis of a graphene-copper (G-Cu) composite with electrochemically exfoliated graphenes. The fabrication and evaluation of the G-Cu composite microstructures, including the microcantilevers and micromirrors supported by the composite, are reported. We evaluated not only the micromechanical properties of the G-Cu composite based on in-situ mechanical resonant frequency measurements using a laser Doppler vibrometer but also the coefficients of thermal expansion (CTE) of the composite based on curvature radius measurements at a temperature range of 20–200 °C. The Young’s modulus and shear modulus of the composite are approximately 123 and 51 GPa, which are 1.25 times greater and 1.22 times greater, respectively, than those of pure Cu due to the reinforcement of graphene. The G-Cu composite exhibits a 23% lower CTE than Cu without sacrificing electrical conductivity. These results show that the mechanically strengthened G-Cu composite with reduced thermal expansion is an ideal and reliable interconnection material instead of Cu for complex integration structures.

1 October 2018 in Journal of Power Sources
Verified
Journal Article
Closed access
JLJinhua Li
Jinhua Li
MZMinjie Zhu
Minjie Zhu
ZAZhonglie An
Zhonglie An
ZWZhuqing Wang
Zhuqing Wang
MTMasaya Toda
Masaya Toda
TOTakahito Ono
Takahito Ono

1 January 2018 in Solid State Communications
Verified
Journal Article
Closed access
JLJinlong Lv
Jinlong Lv
ZWZhuqing Wang
Zhuqing Wang
HMHideo Miura
Hideo Miura

1 March 2018 in Surface and Coatings Technology
Verified
Journal Article
Closed access
LJLv Jinlong
Lv Jinlong
ZWZhuqing Wang
Zhuqing Wang
LTLiang Tongxiang
Liang Tongxiang
KSKen Suzuki
Ken Suzuki
MHMiura Hideo
Miura Hideo

4 February 2016 in ACS Applied Materials & Interfaces
Verified
Journal Article
Closed access
JLJinhua Li
Jinhua Li
ZAZhonglie An
Zhonglie An
ZWZhuqing Wang
Zhuqing Wang
MTMasaya Toda
Masaya Toda
TOTakahito Ono
Takahito Ono