Deniz  Pekin

Deniz Pekin


Research Focus & Metrics

Academic Career Length

6Years (2021-Present)

(Calculated once Scilit publication data is synced: current year − year of first publication + 1)

Representative Publications

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12 December 2021 in Micromachines
Verified
Journal Article
Open access
PDF file
MKMomoko Kumemura
Momoko Kumemura
DPDeniz Pekin
Deniz Pekin
VMVivek Anand Menon
Vivek Anand Menon
Isabelle Van SeuningenIsabelle Van Seuningen
Isabelle Van Seuningen
Dominique CollardDominique Collard
Dominique Collard
MTMehmet Cagatay Tarhan
Mehmet Cagatay Tarhan
The adaptability of microscale devices allows microtechnologies to be used for a wide range of applications. Biology and medicine are among those fields that, in recent decades, have applied microtechnologies to achieve new and improved functionality. However, despite their ability to achieve assay sensitivities that rival or exceed conventional standards, silicon-based microelectromechanical systems remain underutilised for biological and biomedical applications. Although microelectromechanical resonators and actuators do not always exhibit optimal performance in liquid due to electrical double layer formation and high damping, these issues have been solved with some innovative fabrication processes or alternative experimental approaches. This paper focuses on several examples of silicon-based resonating devices with a brief look at their fundamental sensing elements and key fabrication steps, as well as current and potential biological/biomedical applications.