Piezoelectric vibration energy harvesting (pVEH) microdevices can convert the mechanical vibrations to electrical voltages. In the future, these microdevices can provide an alternative to replace the electrochemical batteries, which cause contamination due to their toxic materials. We present the electromechanical modeling of a pVEH microdevice with a novel resonant structure for air conditioning vents at office buildings. This electromechanical modeling includes different multilayers and cross-sections of the microdevice resonator as well as the air damping. This microdevice uses a flexible substrate and it does not include toxics materials. The microdevice has a resonant structure formed by multilayer beams and U-shape proof mass of UV-resin (730 μm thickness). The multilayer beams contain flexible substrates (160 μm thickness) of polyethylene terephthalate (PET), two aluminum electrodes (100 nm thickness), and a ZnO layer (2 μm thickness). An analytical model is developed to predict the first bending resonant frequency and deflections of the microdevice. This model considers the Rayleigh and Macaulay methods, and the Euler-Bernoulli beam theory. In addition, the electromechanical behavior of the microdevice is determined through the finite element method (FEM) models. In these FEM models, the output power of the microdevice is obtained using different sinusoidal accelerations. The microdevice has a resonant frequency of 60.3 Hz, a maximum deflection of 2.485 mm considering an acceleration of 1.5 m/s², an output voltage of 2.854 V and generated power of 37.45 μW with a load resistance of 217.5 kΩ. An array of pVEH microdevices connected in series could be used to convert the displacements of air conditioning vents at office buildings into voltages for electronic devices and sensors.

Owing to the escalating adoption of IoT systems across various domains, the demand for mobile and wireless power sources has surged. Although conventional batteries typically serve as energy storage components, the current low-power consumption devices necessitate eco-friendly alterna-tives. In this study, we designed, fabricated, and characterized an energy harvesting device that repurposes mechanical vibrations. A three-beam design was employed to harvest energy across a broader range of potential frequencies. Finite element models were simulated to ascertain the first bending moment for both sets of beams. A nanostructured piezoelectric multilayer film made of ZnO was deposited onto an AISI 304 steel substrate, and a photosensitive resin seismic mass was implemented. Low-cost techniques generating minimal environmental waste were leveraged in the fabrication process. The piezoelectric film was deposited using a spray nebulization technique involving recycled materials and cost-effective equipment. Micrographs of the layers unveiled the presence of nanospheres with diameters of 250 nm. Employing a custom-made shaker, output voltages of 1.08 V and 180 mV, and power outputs of 1.849 µW and 16.2 nW were achieved for each set of beams. The electrical characterization was conducted using a custom-made shaker, repurposing materials for this objective.