Microlens arrays (MLAs) are widely used in optical imaging, dense wavelength division multiplexing, optical switching, and microstructure patterning, etc. However, the light modulation capability for both the conventional refractive-type MLA and planar diffractive-type MLA is still staying at the diffraction-limited scale. Here we propose and experimentally demonstrate a high numerical aperture (NA) supercritical lens (SCL) array which could achieve a sub-diffraction-limited focal spot lattice in the far field. The intensity distribution for all the focal spots has good uniformity with the lateral size around 0.45 λ / N A (0.75X Airy unit). The elementary unit in the SCL array composes a series of concentric belts with a feature size in micrometer scale. By utilizing an ultrafast ultraviolet lithography technique, a centimeter scale SCL array could be successfully patterned within 10 mins. Our results may provide possibilities for the applications in optical nanofabrication, super-resolution imaging, and ultrafine optical manipulation.

The advent of planar metalenses, including the super‐oscillatory lens (SOL) and the supercritical lens (SCL) with distinctive interference properties, has profoundly impacted on the long‐lasting perception of the far‐field optical diffraction limit. In spite of its conspicuous success in achieving marvelously small focal spots, the planar metalens still faces tough design and fabrication challenges to realize high focusing efficiency. In this work, we demonstrated a dual‐mode laser fabrication technique based on two‐photon polymerization for realizing the multilevel phase SCL with focusing efficiency spiking. Synergistically controlling two types of movement trajectory, which is implemented with the piezo stage and the scanning galvo mirror, enables the fabrication of complicated structures with sub‐diffraction‐limit feature size. By utilizing such advantage, SCLs with discretized multilevel phase configurations are explicitly patterned. The experimental characterization results have shown that a four‐level phase SCL can focus light into a sub‐diffraction‐limit spot with the lateral size of 0.41 λ/NA (NA is the numerical aperture), while achieve the focal spot intensity and the energy concentration ratio in the focal region 7.2 times and 3 times that of the traditional binary amplitude‐type SCL with the same optimization conditions, respectively. Our results may release the application obstacles for the sub‐diffraction‐limit planar metalens and enable major advances in the fields from label‐free optical super‐resolution imaging to high precision laser fabrication.

Optical fiber facet has rapidly emerged as a powerful light-coupling platform for integrating metasurfaces with miniaturized footprint and multifarious functionalities, through direct lithographic patterning or decal transfer. However, the fiber integrated metasurfaces investigated so far have been usually limited to high refractive index (RI) materials, thus leading to severe impedance mismatch at the fiber/metasurface interface and low efficiency. Here we report a single-mode fiber (SMF) integrated metalens based on low-RI material. We theoretically show that the highly divergent beam at the cleaved SMF is fully collimated by the metalens consisting of elliptical nanoposts with uniform height but varied width and length. The spatial wavefront of the transmitted light at the end facet of the light waveguide is properly modulated by the metasurface while maintaining an efficiency beyond 95% in the simulation. This study demonstrates a roadmap to design highly efficient SMF integrated metasurface based on low-RI material and may find applications in biomedical and optical imaging.

Light manipulation at the nanoscale is the vanguard of plasmonics. Controlling light radiation into a desired direction in parallel with high optical signal enhancement is still a challenge for designing ultracompact nanoantennas far below subwavelength dimensions. Here, we theoretically demonstrate the unidirectional emissions from a local nanoemitter coupled to a hybrid nanoantenna consisting of a plasmonic dipole antenna and an individual silicon nanorod. The emitter near-field was coupled to the dipolar antenna plasmon resonance to achieve a strong radiative decay rate modification, and the emitting plasmon pumped the multipoles within the silicon nanorod for efficient emission redirection. The hybrid antenna sustained a high forward directivity (i.e., a front-to-back ratio of 30 dB) with broadband operating wavelengths in the visible range (i.e., a spectral bandwidth of 240 nm). This facilitated a large library of plasmonic nanostructures to be incorporated, from single element dipole antennas to gap antennas. The proposed hybrid optical nanorouter with ultracompact structural dimensions of 0.08 λ² was capable of spectrally sorting the emission from the local point source into distinct far-field directions, as well as possessing large emission gains introduced by the nanogap. The distinct features of antenna designs hold potential in the areas of novel nanoscale light sources, biosensing, and optical routing.

The supercritical lens has shown a remarkable capability of achieving far-field sub-diffraction limited focusing through elaborating a modulated interference effect. Benefiting from the relative high energy utilization efficiency and weak sidelobe properties, the supercritical lens holds significant advantage in a series of application scenarios. However, all of the demonstrated supercritical lenses mainly work in the on-axis illumination condition, so the off-axis aberration effect will severely deteriorate its sub-diffraction limit focusing capability for the illuminating beam with an oblique angle. In this work, an aberration-compensated supercritical lens with single-layer configuration is proposed and experimentally demonstrated. Such a single-layer supercritical lens consists of multilevel phase configurations patterned with the two-photon polymerization lithography technique. The simulation and experimental recorded results show that the aberration-compensated supercritical lens with a numerical aperture value of 0.63 could achieve a far-field sub-diffraction limited focusing property within 20° field of view at a wavelength of λ = 633 nm. This monochromatic aberration-compensated supercritical lens with single-layer configuration indicates excellent potential in the development of laser scanning ultrahigh optical storage and label free super-resolution imaging.