Niobium-containing diamond-like carbon films (a-C:H:Nb) were deposited in a hybrid plasma-enhanced chemical vapor deposition (PECVD) and direct-current magnetron sputtering (DCMS) process, using a niobium target in an argon/acetylene atmosphere on industrial polyimide foil, spin-coated polyimide foil, and alumina substrates. While the coating on the industrial foil tends to crack, the thin films on the spin-coated polyimide and the ceramic substrates showed good adhesion, as well as a smooth and dense topography. Investigations of the electrical properties revealed their suitability as biocompatible sensor materials in strain gauges, with a gauge factor of up to 3.2 and a temperature coefficient of the electrical resistance (TCR) of −200 ppm/K.