According to the equation for Newtonian fluids, the film thickness after spin coating is determined by five parameters: angular velocity, spin coating time, viscosity, density of the coating material, and initial thickness of the material before spin coating. The spin coating process is commonly controlled by adjusting only the angular velocity parameter and the coating time in the Newtonian expression. However, the measured coating thickness obtained is then compared to the theoretical thickness calculated from the Newtonian fluid equation. The measured coating thickness usually varies somewhat from the theoretical thickness; further details are described in Section 1. Thus, the Newtonian fluid equation must be modified to better represent the actual film thickness. In this paper, we derive a new formula for the spin coating film thickness, which is based on the equation for Newtonian fluids, but modified to better represent film thicknesses obtained experimentally. The statistical analysis is performed to verify our modifications.

In this paper, we use a Gaussian process to define a generalized integral transform (GIT) and a generalized convolution product (GCP) of functionals defined on a function space. We establish the existence and some properties for the GIT, the GCP and the inverse integral transform. Finally, we prove a Fubini theorem for the GIT and the GCP.

We define two sequential transforms on a function spaceCa,b[0,T]induced by generalized Brownian motion process. We then establish the existence of the sequential transforms for functionals in a Banach algebra of functionals onCa,b[0,T]. We also establish that any one of these transforms acts like an inverse transform of the other transform. Finally, we give some remarks about certain relations between our sequential transforms and other well-known transforms onCa,b[0,T].

In this paper we obtain several basic formulas for generalized integral transforms, convolution products, first variations and inverse integral transforms of functionals defined on function space.