Artificial neurons and synapses are critical units for processing intricate information in neuromorphic systems. Memristors are frequently engineered as artificial synapses due to their simple structures, gradually changing conductance and high-density integration. However, few studies have designed memristors as artificial neurons. In this letter, we demonstrate an integration-and-fire artificial neuron based on a Ag/SiO2/Au threshold switching memristor. This neuron displays four critical features for action-potential-based computing: the all-or-nothing spiking of an action potential, threshold-driven spiking, a refractory period, and a strength-modulated frequency response. As a post-synaptic neuron, the designed neuron was demonstrated to be applicable to digit recognition. These results demonstrate that the developed artificial neuron can realize the basic functions of spiking neurons and has great potential for neuromorphic computing.
Memory devices with high speed and high density are highly desired to address the ‘memory wall’ issue. Here we demonstrated a highly scalable, three-dimensional stackable ferroelectric diode, with its rectifying polarity modulated by the polarization reversal of Hf0.5Zr0.5O2 films. By visualizing the hafnium/zirconium lattice order and oxygen lattice order with atomic-resolution spherical aberration-corrected STEM, we revealed the correlation between the spontaneous polarization of Hf0.5Zr0.5O2 film and the displacement of oxygen atom, thus unambiguously identified the non-centrosymmetric Pca21 orthorhombic phase in Hf0.5Zr0.5O2 film. We further implemented this ferroelectric diode in an 8 layers 3D array. Operation speed as high as 20 ns and robust endurance of more than 109 were demonstrated. The built-in nonlinearity of more than 100 guarantees its self-selective property that eliminates the need for external selectors to suppress the leakage current in large array. This work opens up new opportunities for future memory hierarchy evolution.
The resistive switching effect in memristors typically stems from the formation and rupture of localized conductive filament paths, and HfO2 has been accepted as one of the most promising resistive switching materials. However, the dynamic changes in the resistive switching process, including the composition and structure of conductive filaments, and especially the evolution of conductive filament surroundings, remain controversial in HfO2-based memristors. Here, the conductive filament system in the amorphous HfO2-based memristors with various top electrodes is revealed to be with a quasi-core-shell structure consisting of metallic hexagonal-Hf6O and its crystalline surroundings (monoclinic or tetragonal HfOx). The phase of the HfOx shell varies with the oxygen reservation capability of the top electrode. According to extensive high-resolution transmission electron microscopy observations and ab initio calculations, the phase transition of the conductive filament shell between monoclinic and tetragonal HfO2 is proposed to depend on the comprehensive effects of Joule heat from the conductive filament current and the concentration of oxygen vacancies. The quasi-core-shell conductive filament system with an intrinsic barrier, which prohibits conductive filament oxidation, ensures the extreme scalability of resistive switching memristors. This study renovates the understanding of the conductive filament evolution in HfO2-based memristors and provides potential inspirations to improve oxide memristors for nonvolatile storage-class memory applications.
Atomic-resolution Cs-corrected scanning transmission electron microscopy revealed local shifting of two oxygen positions (OI and OII) within the unit cells of a ferroelectric (Hf0.5Zr0.5)O2 thin film. A reversible transition between the polar Pbc21 and antipolar Pbca phases, where the crystal structures of the 180° domain wall of the Pbc21 phase and the unit cell structure of the Pbca phase were identical, was induced by applying appropriate cycling voltages. The critical field strength that determined whether the film would be woken up or fatigued was ~0.8 MV/cm, above or below which wake-up or fatigue was observed, respectively. Repeated cycling with sufficiently high voltages led to development of the interfacial nonpolar P42/nmc phase, which induced fatigue through the depolarizing field effect. The fatigued film could be rejuvenated by applying a slightly higher voltage, indicating that these transitions were reversible. These mechanisms are radically different from those of conventional ferroelectrics.
In this letter, effects of top electrodes (TEs) on ferroelectric properties of Hf0.5Zr0.5O2 (HZO) thin films are examined systematically. The remnant polarization (Pr) of HZO thin films increases by altering TEs with lower thermal expansions coefficient (α). The largest 2Pr value of 38.72 μC/cm2 is observed for W TE with α=4.5×10-6/K, while the 2Pr value is only 22.83 μC/cm2 for Au TE with α=14.2×10-6/K. Meanwhile, coercive field (Ec) shifts along electric field axis and the offset is found to be dependent on the difference of workfunctions (WFs) between TE and TiN bottom electrode (BE). Ec shifts toward negative/positive direction, when the WF of TE is larger/smaller (Pt, Pd, Au/W, Al, Ta) than TiN BE. This work provides an effective way to modulate HfO2-based device performance for different requirements in actual application.