The paper presents the results of an investigation of the nanostructure, elements, and phase composition of thin (100–140 nm) tin dioxide films obtained via magnetron sputtering and containing Ag, Y, Sc, Ag + Y, and Ag + Sc additives in the volume. Electrical and gas‐sensitive characteristics of hydrogen sensors based on these films with dispersed Pt/Pd layers deposited on the surface were studied. The additives had a significant effect on the nanostructure of the films, the density of oxygen adsorption sites on the surface of tin dioxide, the band bending at the grain boundaries of tin dioxide, the resistance values in pure air, and the responses to hydrogen in the concentration range of 50–2000 ppm. During the long‐term tests of most of the samples studied, there was an increase in the resistance of the sensors in clean air and in the response to hydrogen. It has been established that the joint introduction of Ag + Y into the volume of films prevents the increase in the resistance and response. For these sensors based on thin films of Pt/Pd/SnO₂:Sb, Ag, Y the responses to 100 and 1000 ppm of H₂ are 25 and 575, correspondingly, the response time at exposure to 100 and 1000 ppm of H₂ are 10 and 90 s, the recovery time at exposure to 100 and 1000 ppm of H₂ 17 and 125 s. Possible mechanisms of the effect of additives on the properties of sensors and the stability of their parameters during long‐term operation were considered.

This paper presents the results of a study on the characteristics of semiconductor sensors based on thin SnO₂ films modified with antimony, dysprosium, and silver impurities and dispersed double Pt/Pd catalysts deposited on the surface to detect carbon monoxide (CO). An original technology was developed, and ceramic targets were made from powders of Sn-Sb-O, Sn–Sb-Dy–O, and Sn–Sb-Dy-Ag–O systems synthesized by the sol–gel method. Films of complex composition were obtained by RF magnetron sputtering of the corresponding targets, followed by technological annealing at various temperatures. The morphology of the films, the elemental and chemical composition, and the electrical and gas-sensitive properties were studied. Special attention was paid to the effect of the film composition on the stability of sensor parameters during long-term tests under the influence of CO. It was found that different combinations of concentrations of antimony, dysprosium, and silver had a significant effect on the size and distribution of nanocrystallites, the porosity, and the defects of films. The mechanisms of degradation under prolonged exposure to CO were examined. It was established that Pt/Pd/SnO₂:0.5 at.% Sb film with optimal crystallite sizes and reduced porosity provided increased stability of carbon monoxide sensor parameters, and the response to the action of 100 ppm carbon monoxide was G₁/G₀ = 2–2.5.

The effect of humidity on the electrical and gas-sensitivity properties of NO₂ sensors based on thin (∼100 nm) nanocrystalline films of tungsten trioxide and tin dioxide with additions of gold in the bulk and on the surface (Au/WO₃:Au, Au/SnO₂:Sb,Au) is investigated. It is found that the conductivity of these films in pure air increases only slightly as absolute humidity A rises from 2 to 16 g/m³, the responses for nitrogen dioxide in the concentration range of 0.45–10 ppm do not depend on humidity, and the response time is shortened as A rises. Analysis of experimental data using a model based on the assumed microcrystal availability in WO₃ and SnO₂ thin films connected by conductivity bridges shows that the values of the heat of adsorption ΔE _N and activation energies of adsorption E _aN and desorption E _dN of ions NO ₂ ⁻ on the films surface modified gold, do not depend on the humidity.