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<mml:math display="inline"><mml:mrow><mml:mi mathvariant="normal">Hf</mml:mi><mml:msub><mml:mi mathvariant="normal">O</mml:mi><mml:mrow><mml:mn>2</mml:mn></mml:mrow></mml:msub></mml:mrow></mml:math>HfO2 films were grown by metallorganic chemical vapor deposition (MOCVD) at <mml:math display="inline"><mml:mrow><mml:mn>400</mml:mn><mml:mo>°</mml:mo><mml:mi mathvariant="normal">C</mml:mi></mml:mrow></mml:math>400°C using tetrakis(diethylamido)hafnium <mml:math display="inline"><mml:mrow><mml:mo>[</mml:mo><mml:mi mathvariant="normal">Hf</mml:mi><mml:msub><mml:mrow><mml:mo>(</mml:mo><mml:mi mathvariant="normal">N</mml:mi><mml:msub><mml:mrow><mml:mo>(</mml:mo><mml:msub><mml:mi mathvariant="normal">C</mml:mi><mml:mrow><mml:mn>2</mml:mn></mml:mrow></mml:msub><mml:msub><mml:mi mathvariant="normal">H</mml:mi><mml:mrow><mml:mn>5</mml:mn></mml:mrow></mml:msub><mml:mo>)</mml:mo></mml:mrow><mml:mrow><mml:mn>2</mml:mn></mml:mrow></mml:msub><mml:mo>)</mml:mo></mml:mrow><mml:mrow><mml:mn>4</mml:mn></mml:mrow></mml:msub><mml:mo>]</mml:mo></mml:mrow></mml:math>[Hf(N(C2H5)2)4] as a precursor and oxygen gas as an oxidizing agent. The film was polycrystalline and had gradational compositions of Hf and O atoms. Current-voltage characteristics of the films were investigated with <mml:math display="inline"><mml:mrow><mml:mn>1</mml:mn><mml:mspace width="0.3em"></mml:mspace><mml:mi>mA</mml:mi></mml:mrow></mml:math>1mA compliance. A reproducible resistance switching behavior was observed with high resistance ratio of about <mml:math display="inline"><mml:mrow><mml:msup><mml:mrow><mml:mn>10</mml:mn></mml:mrow><mml:mrow><mml:mn>4</mml:mn></mml:mrow></mml:msup><mml:mo>–</mml:mo><mml:msup><mml:mrow><mml:mn>10</mml:mn></mml:mrow><mml:mrow><mml:mn>9</mml:mn></mml:mrow></mml:msup></mml:mrow></mml:math>104–109 , which is higher than other comparable materials, such as <mml:math display="inline"><mml:mrow><mml:mi mathvariant="normal">Ti</mml:mi><mml:msub><mml:mi mathvariant="normal">O</mml:mi><mml:mrow><mml:mn>2</mml:mn></mml:mrow></mml:msub></mml:mrow></mml:math>TiO2 and <mml:math display="inline"><mml:mrow><mml:mi mathvariant="normal">Zr</mml:mi><mml:msub><mml:mi mathvariant="normal">O</mml:mi><mml:mrow><mml:mn>2</mml:mn></mml:mrow></mml:msub></mml:mrow></mml:math>ZrO2 . SET and RESET voltages were measured about 0.8 and <mml:math display="inline"><mml:mrow><mml:mn>1.5</mml:mn><mml:mspace width="0.3em"></mml:mspace><mml:mi mathvariant="normal">V</mml:mi></mml:mrow></mml:math>1.5V , respectively, indicating that the device can be operated below <mml:math display="inline"><mml:mrow><mml:mn>2</mml:mn><mml:mspace width="0.3em"></mml:mspace><mml:mi mathvariant="normal">V</mml:mi></mml:mrow></mml:math>2V . The devices were operated in ohmic conduction mechanism. During the forming process, characteristics of Schottky emission were observed, which indicates that conduction mechanisms between SET and forming processes are different. The bipolar resistance switching behavior was also observed as well as unipolar resistance switching behavior.No biography provided yet