Metasurfaces can be programmed for a spatial transformation of the wavefront, thus allowing parallel optical signal processing on-chip within an ultracompact dimension. On-chip metasurfaces have been implemented with two-dimensional periodic structures, however, their inherent scattering loss limits their large-scale implementation. The scattering can be minimized in single layer high-contrast transmitarray (HCTA) metasurface. Here we demonstrate a one-dimensional HCTA based lens defined on a standard silicon-on-insulator substrate, with its high transmission (<1 dB loss) maintained over a 200 nm bandwidth. Three layers of the HCTAs are cascaded for demonstrating meta-system functionalities of Fourier transformation and differentiation. The meta-system design holds potential for realizing on-chip transformation optics, mathematical operations and spectrometers, with applications in areas of imaging, sensing and quantum information processing.

Miniaturized image classifiers are potential for revolutionizing their applications in optical communication, autonomous vehicles, and healthcare. With subwavelength structure enabled directional diffraction and dispersion engineering, the light propagation through multi-layer metasurfaces achieves wavelength-selective image recognitions on a silicon photonic platform at telecommunication wavelength. The metasystems implement high-throughput vector-by-matrix multiplications, enabled by near 10³ nanoscale phase shifters as weight elements within 0.135 mm² footprints. The diffraction manifested computing capability incorporates the fabrication and measurement related phase fluctuations, and thus the pre-trained metasystem can handle uncertainties in inputs without post-tuning. Here we demonstrate three functional metasystems: a 15-pixel spatial pattern classifier that reaches near 90% accuracy with femtosecond inputs, a multi-channel wavelength demultiplexer, and a hyperspectral image classifier. The diffractive metasystem provides an alternative machine learning architecture for photonic integrated circuits, with densely integrated phase shifters, spatially multiplexed throughput, and data processing capabilities.

Non-Hermitian systems with their spectral degeneracies known as exceptional points (EPs) have been explored for lasing, controlling light transport, and enhancing a sensor’s response. A ring resonator can be brought to an EP by controlling the coupling between its frequency degenerate clockwise and counterclockwise traveling modes. This has been typically achieved by introducing two or more nanotips into the resonator’s mode volume. While this method provides a route to study EP physics, the basic understanding of how the nanotips’ shape and size symmetry impact the system’s non-Hermicity is missing, along with additional loss from both in-plane and out-of-plane scattering. The limited resonance stability poses a challenge for leveraging EP effects for switches or modulators, which requires stable cavity resonance and fixed laser-cavity detuning. Here we use lithographically defined asymmetric and symmetric Mie scatterers, which enable subwavelength control of wave transmission and reflections without deflecting to additional radiation channels. We show that those pre-defined Mie scatterers can bring the system to an EP without post tuning, as well as enable chiral light transport within the resonator. Counterintuitively, the Mie scatterer results in enhanced quality factor measured on the transmission port, through coherently suppressing the backscattering from the waveguide surface roughness. The proposed device platform enables pre-defined chiral light propagation and backscattering-free resonances, needed for various applications such as frequency combs, solitons, sensing, and other nonlinear optical processes such as photon blockade, and regenerative oscillators. Graphical Abstract

Integrated photonic circuits are created as a stable and small form factor analogue of fiber‐based optical systems, from wavelength‐division multiplication transceivers to more recent mode‐division multiplexing components. Silicon nanowire waveguides guide the light in a way that single and few mode fibers define the direction of signal flow. Beyond communication tasks, on‐chip cascaded interferometers and photonic meshes are also sought for optical computing and advanced signal processing technology. Here we review an alternative way of defining the light flow in the integrated photonic platform, using arrays of subwavelength meta‐atoms or metalines for guiding the diffraction and interference of light. The integrated metasurface system mimics free‐space optics, where on‐chip analogues of basic optical components are developed with foundry compatible geometry, such as low‐loss lens, spatial‐light modulator, and other wavefront shapers. We discuss the role of metasurface in integrated photonic signal processing systems, introduce the design principles of such metasurface systems for low loss compact mode conversion, mathematical operation, diffractive optical systems for hyperspectral imaging, and tuning schemes of metasurface systems. Then we perceive reconfigurability schemes for metasurface framework, toward optical neural networks and analog photonic accelerators.

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Exceptional points (EPs) have been extensively explored in mechanical, acoustic, plasmonic, and photonic systems. However, little is known about the role of EPs in tailoring the dynamic tunability of optical devices. A specific type of EPs known as chiral EPs has recently attracted much attention for controlling the flow of light and for building sensors with better responsivity. A recently demonstrated route to chiral EPs via lithographically defined symmetric Mie scatterers on the rim of resonators has not only provided the much-needed mechanical stability for studying chiral EPs, but also helped reduce losses originating from nanofabrication imperfections, facilitating the in-situ study of chiral EPs and their contribution to the dynamics and tunability of resonators. Here, we use asymmetric Mie scatterers to break the rotational symmetry of a microresonator, to demonstrate deterministic thermal tuning across a chiral EP, and to demonstrate EP-mediated chiral optical nonlinear response and efficient electro-optic tuning. Our results indicate asymmetric electro-optic modulation with up to 17 dB contrast at GHz and CMOS-compatible voltage levels. Such wafer-scale nano-manufacturing of chiral electro-optic modulators and the chiral EP-tailored tunning may facilitate new micro-resonator functionalities in quantum information processing, electromagnetic wave control, and optical interconnects.