MEMS (Micro Electro-Mechanical Systems) sensors enable a vast range of applications: among others, the use of MEMS accelerometers for seismology related applications has been emerging considerably in the last decade. In this paper, we provide a comprehensive review of the capacitive MEMS accelerometers: from the physical functioning principles, to the details of the technical precautions, and to the manufacturing procedures. We introduce the applications within seismology and earth sciences related disciplines, namely: earthquake observation and seismological studies, seismic surveying and imaging, structural health monitoring of buildings. Moreover, we describe how the use of the miniaturized technologies is revolutionizing these fields and we present some cutting edge applications that, in the very last years, are taking advantage from the use of MEMS sensors, such as rotational seismology and gravity measurements. In a ten-year outlook, the capability of MEMS sensors will certainly improve through the optimization of existing technologies, the development of new materials, and the implementation of innovative production processes. In particular, the next generation of MEMS seismometers could be capable of reaching a noise floor under the lower seismic noise (few tenths of ng/ $\sqrt{\mathrm{Hz}}$ ) and expanding the bandwidth towards lower frequencies (∼0.01 Hz).

In this paper, we have studied the sources of error of a low-cost 3-axis MEMS accelerometer by means of Power Spectral Density and Allan Variance techniques. These techniques were applied to the signals acquired from ten identical devices to characterize the variability of the sensor produced by the same manufacturer. Our analysis showed as identically produced accelerometer have somehow variable behavior in particular at low frequency. It is therefore of paramount importance before their use in Inertial Navigation or Earthquakes Monitoring System, a complete characterization of each single sensors.

Great advancements in the broad field of the seismic monitoring have been achieved in the last decades mainly because of the technical advancement of the instrumentation. Also the seismic monitoring applications greatly developed, mainly since the 1990s owing to the Micro Electro-Mechanical Systems (MEMS) technology. In this short review we outline the applications of the MEMS technology in various sectors of broad field of seismology, distinguishing three main areas of interest and summarizing the state of the art and the most recent progresses.

A multiscale approach to the monitoring of earthquakes and their effects can represent an effective tool for the reduction of seismic risk. Devoted monitoring networks are essential to cope with the seismic emergency in urban areas, to assess the damage scenarios, which are useful for the preservation of the strategic functions and services and to improve the community resilience to earthquakes. The National Earthquake Observatory, Italian Institute for Geophysics and Volcanology (ONT-INGV, Italy), has been recently involved in several projects devoted to the reduction of seismic risk by means of the implementation of urban-scale and building-scale monitoring networks. Such systems represent a necessary support for the well-established national seismic network. All these approaches (country, urban, and building scale) could be framed within of a unique system in which each part holds different tasks, with the common final objective of the earthquake risk reduction. In this paper different approaches, experiences and potential capabilities on urban seismic networks, structural health and cultural heritage monitoring implemented in Italy by the ONT-INGV will be presented, with the ultimate goal of achieving an effective integrated multi-scale system.

In this paper we simulate unmanned aerial vehicle (UAV) recognition after a possible case of diffuse damage after a seismic event in the town of Acireale (Sicily, Italy). Given a set of sites (84 relevant buildings) and the range of the UAV, we are able to find a number of vehicles to employ and the shortest survey path. The problem of finding the shortest survey path is an operational research problem called the vehicle routing problem (VRP). which has a solution that is known to be computationally time-consuming. We used the simulated annealing (SA) heuristic, which is able to provide stable solutions in a relatively short computing time. We also examined the distribution of the cost of the solutions varying the depot on a regular grid in order to find the best area for executing the survey.

Detection of the Earth’s magnetic field anomalies is the basis of many types of studies in the field of earth sciences and archaeology. These surveys require different ways to carry out the measures but they have in common that they can be very tiring or expensive. There are now several lightweight commercially available magnetic sensors that allow light-UAVs to be equipped to perform airborne measurements for a wide range of scenarios. In this work, the realization and functioning of an airborne magnetometer prototype were presented and discussed. Tests and measures for the validation of the experimental setup for some applications were reported. The flight sessions, appropriately programmed for different types of measurements, made it possible to evaluate the performance of this detection methodology, highlighting the advantages and drawbacks or limitations and future developments. From the results obtained it was possible to verify that the measurement system is capable of carrying out local and potentially archaeological magnetometric measurements with the necessary precautions.