This paper reports a more complete description of the design process of the Center Support Quadruple Mass Gyroscope (CSQMG), a gyro expected to provide breakthrough performance for flat structures. The operation of the CSQMG is based on four lumped masses in a circumferential symmetric distribution, oscillating in anti-phase motion, and providing differential signal extraction. With its 4-fold symmetrical axes pattern, the CSQMG achieves a similar operation mode to Hemispherical Resonant Gyroscopes (HRGs). Compared to the conventional flat design, four Y-shaped coupling beams are used in this new pattern in order to adjust mode distribution and enhance the synchronization mechanism of operation modes. For the purpose of obtaining the optimal design of the CSQMG, a kind of applicative optimization flow is developed with a comprehensive derivation of the operation mode coordination, the pseudo mode inhibition, and the lumped mass twisting motion elimination. The experimental characterization of the CSQMG was performed at room temperature, and the center operation frequency is 6.8 kHz after tuning. Experiments show an Allan variance stability 0.12°/h (@100 s) and a white noise level about 0.72°/h/√Hz, which means that the CSQMG possesses great potential to achieve navigation grade performance.
The micro-electro-mechanical-system (MEMS) inertial measurement unit (IMU) has been widely used in the field of inertial navigation due to its small size, low cost, and light weight, but aligning MEMS IMUs remains a challenge for researchers. MEMS IMUs have been conventionally aligned on a static base, requiring other sensors, such as magnetometers or satellites, to provide auxiliary information, which limits its application range to some extent. Therefore, improving the alignment accuracy of MEMS IMU as much as possible under swing conditions is of considerable value. This paper proposes an alignment method based on the rotation modulation technique (RMT), which is completely self-aligned, unlike the existing alignment techniques. The effect of the inertial sensor errors is mitigated by rotating the IMU. Then, inertial frame-based alignment using the rotation modulation technique (RMT-IFBA) achieved coarse alignment on the swing base. The strong tracking filter (STF) further improved the alignment accuracy. The performance of the proposed method was validated with a physical experiment, and the results of the alignment showed that the standard deviations of pitch, roll, and heading angle were 0.0140 , 0.0097 and 0.91 , respectively, which verified the practicality and efficacy of the proposed method for the self-alignment of the MEMS IMU on a swing base.
Micromachined gyroscopes require high voltage (HV) for actuation and detection to improve its precision, but the deviation of the HV caused by temperature fluctuations will degrade the sensor’s performance. In this paper, a high-voltage temperature-insensitive charge pump is proposed. Without adopting BCD (bipolar-CMOS-DMOS) technology, the output voltage can be boosted over the breakdown voltage of n-well/substrate diode using triple-well NMOS (n-type metal-oxide-semiconductor) transistors. By controlling the pumping clock’s amplitude continuously, closed-loop regulation is realized to reduce the output voltage’s sensitivity to temperature changes. Besides, the output level is programmable linearly in a large range by changing the reference voltage. The whole circuit has been fabricated in a 0.18- m standard CMOS (complementary metal-oxide-semiconductor) process with a total area of 2.53 mm . Measurements indicate that its output voltage has a linear adjustable range from around 13 V to 16.95 V, and temperature tests show that the maximum variations of the output voltage at are less than 1.1%.