π-Conjugated polymers that are electrochemically cycled in ionic liquids have enhanced lifetimes without failure (up to 1 million cycles) and fast cycle switching speeds (100 ms). We report results for electrochemical mechanical actuators, electrochromic windows, and numeric displays made from three types of π -conjugated polymers: polyaniline, polypyrrole, and polythiophene. Experiments were performed under ambient conditions, yet the polymers showed negligible loss in electroactivity. These performance advantages were obtained by using environmentally stable, room-temperature ionic liquids composed of 1-butyl-3-methyl imidazolium cations together with anions such as tetrafluoroborate or hexafluorophosphate.

Conjugated polymer actuators can be operated in aqueous media, which makes them attractive for laboratories-on-a-chip and applications under physiological conditions. One of the most stable conjugated polymers under these conditions is polypyrrole, which can be patterned by means of standard photolithography. Polypyrrole-gold bilayer actuators that bend out of the plane of the wafer have been microfabricated in our laboratory. These can be used to move and position other microcomponents. Here we review the current status of these microactuators, outlining the methods used to fabricate them. We describe the devices that have been demonstrated as well as some potential future applications.

Several types of microactuators have been fabricated, from simple paddles to self-assembling and -disassembling cubes. Conducting bilayers made of a layer of polymer and a layer of gold were used as hinges to connect rigid plates to each other and to a silicon substrate. The bending of the hinges was electrically controlled and reversible, allowing precise three-dimensional positioning of the plates. The structures were released from the substrate with a technique based on differential adhesion. This method, which avoids the use of a sacrificial layer and allows the actuators to pull themselves off the surface, may have general applications in micromachining. Possibilities include the manufacture of surfaces whose light reflection or chemical properties can be switched.

Conjugated polymers have a number of interesting properties that can be exploited in microfabricated sensors and actuators. For example, polypyrrole is a conjugated polymer that can change volume to deliver significant stresses and strains. These materials can be patterned using conventional microfabrication techniques. The procedures for doing this are described in this paper, focusing on the microfabrication of polypyrrole microactuators. In addition, other methods for the deposition and patterning of conjugated polymers are reviewed. A special technique for releasing actuators, differential adhesion, is also detailed.