Fringe projection profilometry (FPP) using a digital video projector is widely used for three-dimensional shape measurement. However, the gamma nonlinearity, system vibration, and noise cause the captured fringe patterns to be nonsinusoidal waveforms and have a grayscale deflection from their true value. This leads to an additional phase measurement error for a general phase-shifting algorithm. Based on the theoretical analysis, we propose a method to eliminate the phase error considering two factors. In this method, four-step phase-shifting is done four times with an initial phase offset of 22.5 deg and the average of these four phase maps precisely results in the real phase. As a result, phase error caused by gamma nonlinearity can be effectively suppressed. In addition, every image in phase shifting is replaced by the average of 20 fringe images continuously captured at the same state to avoid the phase error caused by system vibration and noise. Experimental results show that this method is effective in eliminating the phase error in practical phase-shifting FPP. In general, more than 90% of the phase error can be reduced.

The laser speckle correlation method has found widespread application for obtaining information from vibrating objects. However, the resolution and accuracy of the laser speckle correlation method as they relate to the defocusing degree have not been analyzed sufficiently. Furthermore, the possible methods for speckle pattern quality assessment and enhancement have not been studied. In this study, the resolution and accuracy of the laser speckle correlation method are analyzed, and it is found that they are affected by the defocusing degree and speckle pattern quality, respectively. A new speckle pattern quality criterion combining the mean intensity gradient and frequency spectrum was proposed, called CMZ. The quality of the speckle pattern is higher when the CMZ is closer to zero. The proposed criterion was verified by simulated speckle patterns and real speckle patterns with different speckle sizes, densities, and gray contrasts. In the experimental setup stage, a suitable defocusing degree can be selected based on the resolution requirement and optimal speckle size, and other experimental parameters can be determined according to the CMZ criterion. Rotation and vibration experiments verified the effectiveness of the laser speckle correlation method and confirmed the reliability of the experiment preparation based on proposed CMZ criterion.

Spatial resolution is one of the key factors in orientation microscopy, as it determines the accuracy of grain size investigation and phase identification. We determined the spatial resolutions of on-axis and off-axis transmission Kikuchi diffraction (TKD) methods by calculating correlation coefficients using only the effective parts of on-axis and off-axis transmission Kikuchi patterns. During the calculation, we used average filtering to evaluate the spatial resolution more accurately. The spatial resolutions of both on-axis and off-axis TKD methods were determined in the same scanning electron microscope at different accelerating voltages and specimen thicknesses. The spatial resolution of the on-axis TKD was higher than that of the off-axis TKD at the same parameters. Furthermore, with an increase in accelerating voltage or a decrease in specimen thickness, the spatial resolutions of the two configurations could be significantly improved, from tens of nanometers to below 10 nm. At a voltage of 30 kV and sample thickness of 74 nm, both on-axis and off-axis TKD methods exhibited the highest resolutions of 6.2 and 9.7 nm, respectively.

In optical metrology, the output is usually in the form of a fringe pattern, from which a phase map can be generated and phase information can be converted into the desired parameters. This paper proposes an end-to-end method of fringe phase extraction based on the neural network. This method uses the U-net neural network to directly learn the correspondence between the gray level of a fringe pattern and the wrapped phase map, which is simpler than the exist deep learning methods. The results of simulation and experimental fringe patterns verify the accuracy and the robustness of this method. While it yields the same accuracy, the proposed method features easier operation and a simpler principle than the traditional phase-shifting method and has a faster speed than wavelet transform method.

We propose an electronic speckle pattern interferometry-based measurement method in which a hardware device in the reference arm is used to track the out-of-plane displacement in the objective arm. We developed a real-time one-point out-of-plane displacement measurement system, which uses a Michelson interferometer, a lead zirconate titanate (PZT) device, a charge-coupled device camera, and a tracking control system. The system works by checking the movement of carrier fringes, and the PZT is used to track the displacement. We also developed an efficient tracking algorithm based on direction judgment and correlation computation to determine whether the PZT is activated and the distance that the PZT is ordered to move. Our experimental results demonstrate the effectiveness of the system, and finally, we discuss the detailed mechanism of the system.