One major difficulty of parameter extraction for an equivalent circuit lies in applying an optimization algorithm to efficiently approach the global minimum. Traditional genetic algorithm (GA) is able to find the global minimum but it has very low convergence rate. On the other hand, direct search method may be easily trapped in local minima. In this work, an improved parameter extraction method which is capable of effectively performing the global minimum search is proposed. This method combines GA and Powell’s method to efficiently determine circuit elements of an equivalent circuit model. A spiral inductor and an interdigital capacitor are used as design examples to illustrate the extraction procedure and validate the proposed hybrid method.