We experimentally demonstrate the integration of a microfluidic trap array on top of metamaterial resonators for size selective trapping and remote sensing of microparticles. A split-ring resonator (SRR) design supports strongly confined electric field in the capacitive split gap at the fundamental inductive-capacitive resonance mode. The tightly confined electric field in the SRR gap forms a hot-spot that has become an enabling platform for sensing applications. Here, we extend the concept of metamaterial sensing to “trapping and sensing” by fabricating trapezoidal shaped structures near the split gap that enables trapping of microparticles in the split-gap region of each SRR. The proposed microfluidic metamaterial sensor enables sensing of different refractive index microparticles in terms of change in the transmitted amplitude and resonance frequency of the fundamental resonance mode operating in the terahertz spectral region. The proposed approach exploits the advantages offered by microfluidics, metamaterials, and terahertz technologies to form an ideal platform for ultra-sensitive, label-free, remote, and non-destructive detection of micro-substances.

We present the design, simulation, fabrication, and characterization of a continuously tunable Omega-ring terahertz metamaterial. The tunability of metamaterial is obtained by integrating microactuators into the metamaterial unit cell. Electrothermal actuation mechanism is used to provide higher tuning range, larger stroke, and enhanced repeatability. The maximum achieved tuning range for the resonant frequency is around 0.30 THz for the input power of 500 mW. This shows the potential of using electrothermally actuated microactuators based tunable metamaterial design for application such as filters, absorbers, sensors, and spectral imagers.

We experimentally demonstrate a micro-electro-mechanically switchable near infrared complementary metamaterial absorber by integrating the metamaterial layer to be the out of plane movable microactuator. The metamaterial layer is electrostatically actuated by applying voltage across the suspended complementary metamaterial layer and the stationary bottom metallic reflector. Thus, the effective spacing between the metamaterial layer and bottom metal reflector is varied as a function of applied voltage. With the reduction of effective spacing between the metamaterial and reflector layers, a strong spectral blue shift in the peak absorption wavelength can be achieved. With spacing change of 300 nm, the spectral shift of 0.7 μm in peak absorption wavelength was obtained for near infrared spectral region. The electro-optic switching performance of the device was characterized, and a striking switching contrast of 1500% was achieved at 2.1 μm. The reported micro-electro-mechanically tunable complementary metamaterial absorber device can potentially enable a wide range of high performance electro-optical devices, such as continuously tunable filters, modulators, and electro-optic switches that form the key components to facilitate future photonic circuit applications.

We experimentally report a structurally reconfigurable metamaterial for active switching of near-field coupling in conductively coupled, orthogonally twisted split ring resonators (SRRs) operating in the terahertz spectral region. Out-of-plane reconfigurable microcantilevers integrated into the dark SRR geometry are used to provide active frequency tuning of dark SRR resonance. The geometrical parameters of individual SRRs are designed to have identical inductive-capacitive resonant frequency. This allows for the excitation of classical analogue of electromagnetically induced transparency (EIT) due to the strong conductive coupling between the SRRs. When the microcantilevers are curved up, the resonant frequency of dark SRR blue-shifts and the EIT peak is completely modulated while the SRRs are still conductively connected. EIT modulation contrast of ∼50% is experimentally achieved with actively switchable group delay of ∼2.5 ps. Electrical control, miniaturized size, and readily integrable fabrication process of the proposed structurally reconfigurable metamaterial make it an ideal candidate for the realization of various terahertz communication devices such as electrically controllable terahertz delay lines, buffers, and tunable data-rate channels.

In this paper, we present the dual band absorption characteristics of complementary metamaterial absorber in near infrared (1.3–2.5 μm) region. The dual band absorption is caused by two distinct resonance mechanisms—electrical resonance and cavity resonance. Electrical resonance occurs in the metal layer—top complementary metamaterial and the cavity resonance occurs in the spacer cavity formed between the top complementary metamaterial and bottom metal reflector layers. In order to elucidate the resonant mechanisms and study the effects of geometrical variations on both the resonant absorption behaviours, two sets of experiment were performed. It was seen that with increasing complementary metamaterial pattern dimension, the electrical resonance absorption peak showed a blue shift, while the cavity resonance showed a slight red shift. However, on the other hand, for the increase in spacer thickness, the cavity resonance peak showed a strong red shift, while the electrical resonance peak remained uninfluenced. The reason for these geometrical dependencies, for both resonances, is conceptually analysed. Furthermore, the design was optimized to attain single absorption band by engineering the cavity and electrical resonances to be at the same wavelength. The single absorption band was successfully realized, however, the peak wavelength showed a red shift from the electrical resonance as in dual band absorber case. The reason for the shift was further explored to be caused due to the strong coupling of electrical and cavity resonances. This approach of utilizing different resonant mechanisms for absorption at different wavelengths provides the means to achieve multiband absorbers, using a simple design and low cost fabrication process.