The last decade has witnessed significant advances in energy harvesting technologies as a possible alternative to provide a continuous power supply for small, low-power devices in applications, such as wireless sensing, data transmission, actuation, and medical implants. Piezoelectric energy harvesting (PEH) has been a salient topic in the literature and has attracted widespread attention from researchers due to its advantages of simple architecture, high power density, and good scalability. This paper presents a comprehensive review on the state-of-the-art of piezoelectric energy harvesting. Various key aspects to improve the overall performance of a PEH device are discussed, including basic fundamentals and configurations, materials and fabrication, performance enhancement mechanisms, applications, and future outlooks.

A haptic-feedback glove with triboelectric sensors and piezoelectric stimulators is developed for interaction in virtual space.

A piezoelectric MEMS energy harvester (EH) with low resonant frequency and wide operation bandwidth was designed, microfabricated, and characterized. The MEMS piezoelectric energy harvesting cantilever consists of a silicon beam integrated with piezoelectric thin film (PZT) elements parallel-arranged on top and a silicon proof mass resulting in a low resonant frequency of 36 Hz. The whole chip was assembled onto a metal carrier with a limited spacer such that the operation frequency bandwidth can be widened to 17 Hz at the input acceleration of 1.0 g during frequency up-sweep. Load voltage and power generation for different numbers of PZT elements in series and in parallel connections were compared and discussed based on experimental and simulation results. Moreover, the EH device has a wideband and steadily increased power generation from 19.4 nW to 51.3 nW within the operation frequency bandwidth ranging from 30 Hz to 47 Hz at 1.0 g. Based on theoretical estimation, a potential output power of 0.53 μW could be harvested from low and irregular frequency vibrations by adjusting the PZT pattern and spacer thickness to achieve an optimal design.