In-situ TEM-heating study of the microstructural evolution of CrFeCoNiCu high entropy alloy (HEA) thin films was carried out and morphological and phase changes were recorded. Post annealing investigation of the samples was carried out by high resolution electron microscopy and EDS measurements. The film is structurally and morphologically stable single phase FCC HEA up to 400 °C. At 450 °C the formation of a BCC phase was observed, however, the morphology of the film remained unchanged. This type of transformation is attributed to diffusionless processes (martensitic or massive). From 550 °C fast morphological and structural changes occur, controlled by volume diffusion processes. Fast growing of a new intermetallic phase is observed which contains mainly Cr and has large unit cell due to chemical ordering of components in direction. The surface of the films gets covered with a CrO-type layer, possibly contributing to corrosion resistance of these.