This paper presents a signal processing technique to improve angular rate accuracy of the gyroscope by combining the outputs of an array of MEMS gyroscope. A mathematical model for the accuracy improvement was described and a Kalman filter (KF) was designed to obtain optimal rate estimates. Especially, the rate signal was modeled by a first-order Markov process instead of a random walk to improve overall performance. The accuracy of the combined rate signal and affecting factors were analyzed using a steady-state covariance. A system comprising a six-gyroscope array was developed to test the presented KF. Experimental tests proved that the presented model was effective at improving the gyroscope accuracy. The experimental results indicated that six identical gyroscopes with an ARW noise of 6.2 °/√h and a bias drift of 54.14 °/h could be combined into a rate signal with an ARW noise of 1.8 °/√h and a bias drift of 16.3 °/h, while the estimated rate signal by the random walk model has an ARW noise of 2.4 °/√h and a bias drift of 20.6 °/h. It revealed that both models could improve the angular rate accuracy and have a similar performance in static condition. In dynamic condition, the test results showed that the first-order Markov process model could reduce the dynamic errors 20% more than the random walk model.

In this paper, the performance of two Kalman filter (KF) schemes based on the direct estimated model and differencing estimated model for input rate signal was thoroughly analyzed and compared for combining measurements of a sensor array to improve the accuracy of microelectromechanical system (MEMS) gyroscopes. The principles for noise reduction were presented and KF algorithms were designed to obtain the optimal rate signal estimates. The input rate signal in the direct estimated KF model was modeled with a random walk process and treated as the estimated system state. In the differencing estimated KF model, a differencing operation was established between outputs of the gyroscope array, and then the optimal estimation of input rate signal was achieved by compensating for the estimations of bias drifts for the component gyroscopes. Finally, dynamic simulations and experiments with a six-gyroscope array were implemented to compare the dynamic performance of the two KF models. The 1σ error of the gyroscopes was reduced from 1.4558°/s to 0.1203°/s by the direct estimated KF model in a constant rate test and to 0.5974°/s by the differencing estimated KF model. The estimated rate signal filtered by both models could reflect the amplitude variation of the input signal in the swing rate test and displayed a reduction factor of about three for the 1σ noise. Results illustrate that the performance of the direct estimated KF model is much higher than that of the differencing estimated KF model, with a constant input signal or lower dynamic variation. A similarity in the two KFs’ performance is observed if the input signal has a high dynamic variation.

In this work, we report a new design for an electrostatically actuated microgripper with a post-assembly self-locking mechanism. The microgripper arms are driven by rotary comb actuators, enabling the microgripper to grip objects of any size from 0 to 100 μm. The post-assembly mechanism is driven by elastic deformation energy and static electricity to produce self-locking and releasing actions. The mechanism enables the microgripper arms to grip for long periods without continuously applying the external driving signal, which significantly reduces the effects and damage to the gripped objects caused by these external driving signals. The microgripper was fabricated using a Silicon-On-Insulator (SOI) wafer with a 30 μm structural layer. Test results show that this gripper achieves a displacement of 100 μm with a driving voltage of 33 V, and a metal wire with a diameter of about 1.6 mil is successfully gripped to demonstrate the feasibility of this post-assembly self-locking mechanism.

Obtaining a correlation factor is a prerequisite for fusing multiple outputs of a mircoelectromechanical system (MEMS) gyroscope array and evaluating accuracy improvement. In this paper, a mathematical statistics method is established to analyze and obtain the practical correlation factor of a MEMS gyroscope array, which solves the problem of determining the Kalman filter (KF) covariance matrix Q and fusing the multiple gyroscope signals. The working principle and mathematical model of the sensor array fusion is briefly described, and then an optimal estimate of input rate signal is achieved by using of a steady-state KF gain in an off-line estimation approach. Both theoretical analysis and simulation show that the negative correlation factor has a favorable influence on accuracy improvement. Additionally, a four-gyro array system composed of four discrete individual gyroscopes was developed to test the correlation factor and its influence on KF accuracy improvement. The result showed that correlation factors have both positive and negative values; in particular, there exist differences for correlation factor between the different units in the array. The test results also indicated that the Angular Random Walk (ARW) of 1.57°/h^0.5 and bias drift of 224.2°/h for a single gyroscope were reduced to 0.33°/h^0.5 and 47.8°/h with some negative correlation factors existing in the gyroscope array, making a noise reduction factor of about 4.7, which is higher than that of a uncorrelated four-gyro array. The overall accuracy of the combined angular rate signal can be further improved if the negative correlation factors in the gyroscope array become larger.

The pedestrian inertial navigation system (PINS) based on a miniature inertial measurement unit (MIMU) and zero-velocity update (ZUPT) can achieve pedestrian positioning without any external equipment. However, the ZUPT algorithm cannot correct the drift error of MIMU due to its low observability of heading angle, leading to the divergence of pedestrian tracks. Using multiple MIMUs can improve the measurement accuracy of inertial sensors. Therefore, a differential layout MIMU array composed of multiple low-cost MIMUs is designed for the foot-mounted pedestrian inertial navigation system in this paper. The system consists of two-stage data fusion. In the first stage, multiple sensors are arranged in differential structure on the axes of the carrier, and a Kalman filter (KF) is presented to fuse measurements of multiple MIMUs. In the second stage, a zero-velocity update KF is designed to correct attitude and location errors. Finally, the device-level test results showed that the noise performance of the differential MIMU array was reduced by 82.5%. The system-level test results showed that the positioning error of pedestrian inertial navigation based on the MIMU array accounted for about 0.36% of the total mileage of 1.4km.

In satellite-denied environments such as urban canyons, tunnels, and underground parking facilities, achieving high-precision autonomous positioning for vehicles remains a critical challenge. Although high-precision inertial measurement units (IMUs) can provide accurate dead reckoning, their deployment is limited by cost, size, and power consumption, making low-cost, microelectromechanical systems IMUs (MIMUs) an attractive alternative solution. However, the single MIMU suffers from substantial measurement noise and bias instability, leading to rapid error divergence that cannot sustain long-term autonomous navigation. To address the above issues, this paper proposes an autonomous positioning system based on a wheel-mounted MIMU array (Wheel-AINS). The system adopts a differential layout in which multiple low-cost MIMU chips are installed at the center of each of the left and right rear wheels, forming redundant sensor arrays. By differentially fusing symmetrically mounted chips, common-mode noise and zero bias are effectively canceled while the wheel rotation provides natural rotational modulation. The fused gyroscope outputs and known wheel radius are then used to estimate the vehicle forward speed, replacing traditional odometers. The estimated wheel speed and vehicle kinematic constraints are then integrated within a Kalman filter framework to suppress the error divergence of the inertial navigation system. A dedicated embedded hardware prototype with multi-chip synchronous acquisition and wireless transmission was developed. Three groups of urban road tests with total distances of 0.85 km, 2.14 km, and 2.49 km were conducted. The results indicate that the average position drift rate of the Wheel-AINS is 0.50%, and the average heading RMSE is 12.2°. The closure error of the 2.49 km trajectory is 10.43 m, reduced by approximately 80% compared with a single MIMU. The ablation experiment reveals that the MIMU array fusion module is the primary source of accuracy improvement, reducing the position RMSE from 155.0 m to 10.1 m, while the dual-wheel distance constraint further optimizes the position RMSE to 8.2 m, but increases the heading RMSE from 13.3° to 13.6°. This demonstrates that the proposed method can substantially improve autonomous positioning accuracy while maintaining a notably low system cost, providing a viable technical pathway for long-endurance vehicle navigation in satellite-denied environments.