Shanghai Engineering Research Center of Ultra-Precision Motion Control and Measurement, Academy for Engineering and Technology, Fudan University, Shanghai, China
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Chenyang Ding
Shanghai Engineering Research Center of Ultra-Precision Motion Control and Measurement, Academy for Engineering and Technology, Fudan University, Shanghai, China
The feedforward control is becoming increasingly important in ultra-precision stages. However, the conventional model-based methods can not achieve expected performance in new-generation stages since it is hard to obtain the accurate plant model due to the complicated stage dynamical properties. To tackle this problem, this paper develops a model-free data-driven adaptive iterative learning approach that is designed in the frequency-domain. Explicitly, the proposed method utilizes the frequency-response data to learn and update the output of the feedforward controller online, which benefits that both the structure and parameters of the plant model are not required. An unbiased estimation method for the frequency response of the closed-loop system is proposed and proved through the theoretical analysis. Comparative experiments on a linear motor confirm the effectiveness and superiority of the proposed method, and show that it has the ability to avoid the performance deterioration caused by the model mismatch with the increasing iterative trials.