(Al)GaN recess-free normally OFF technology is developed for fabrication of high-yield lateral GaN-based power devices. The recess-free process is achieved by an ultrathin-barrier (UTB) AlGaN/GaN heterostructure that features a natural pinched-off 2-D electron gas channel. The top-down manufacturing technique overcomes the challenges in etching of AlGaN barrier with well-controlled depth and uniformity, which is especially attractive for fabrication of normally OFF GaN-based high-electron-mobility transistors (HEMTs) and metal-insulator-semiconductor HEMTs (MIS-HEMTs) on large-size Si substrate. With SiNx passivation grown by low-pressure chemical-vapor deposition, on-resistance of the UTB-AlGaN/GaN-based power devices can be significantly reduced. High-uniformity low-hysteresis normally OFF HEMTs and Al₂O₃/AlGaN/GaN MIS-HEMTs are successfully demonstrated on the UTB AlGaN/GaN-on-Si platform. It is also a compelling technology platform for manufacturing high-performance GaN-based lateral power diodes, and normally OFF p-(Al)GaN heterojunction field-effect transistors.

We report on the electrical and microstructural characterization of Au-free Ti/Al/Ti/TiN contacts for AlGaN/GaN heterostructures. Ultra-low Au-free ohmic contact has been obtained with contact resistance and specific contact resistivity as low as 0.21 Ω · mm and 1.16 x 10 ^-6 Ω · cm ² , respectively. The ohmic alloy temperature is reduced as low as 550 °C by pre-ohmic recess of the AlGaN barrier and optimization of the thickness of bottom Ti layer. We found that interfacial layer formation of AlN between the ohmic metal and AlGaN surface is crucial to realize a low contact resistance with reduced low annealing temperature by a combination of electrical I-V characterization and high-resolution transmission electron microscopy analysis. Furthermore, we suggest a hypothesis that the bottom Ti layer plays a catalytic role for the Al-N reaction with optimized thickness.