In this paper, high-performance bottom-gate thin-film transistors (TFTs) with transparent zinc oxide (ZnO) channels have been developed. The ZnO film for active channels was deposited by RF magnetron sputtering. The crystallinity of the ZnO film drastically improved when it was deposited on a doublelayer SiOx/SiNx gate insulator. In order to achieve a ZnO TFT back-plane for liquid-crystal display (LCD) with the required pattern accuracy, dry etching of the ZnO film in an Ar and CH4 chemistry has been developed. The etching rate and tapered profile of the ZnO film could be controlled by the Ar content in the etching gases of Ar and CH4. The saturation mobility (musat) of the ZnO TFT strongly depended on a gate voltage. A musat of 5.2 & cm2 .(V .s)-1 at VGS = 40 V and VDS = 10 V, and an on/off-current ratio of 2.7 x 107 were obtained. A drain-current uniformity of plusmn7% was achieved within a radius of 20 mm from the substrate center. A 1.46 -in diagonal LCD with 61 600 pixels has been driven by the ZnO-TFT back-plane. A moving picture image was available on fabricated LCD driven by the ZnO TFTs.
11 July 2016 in Journal of Physics D: Applied Physics
The efficacy of helium (He) and argon (Ar) plasma jets are being investigated for different healthcare applications including wound and cancer therapy, sterilisation and surface disinfections. Current research points to a potential link between the generation of reactive oxygen and nitrogen species (RONS) and outcomes in a range of biological and medical applications. As new data accrue, further strengthening this link, it becomes important to understand the controlled delivery of RONS into solutions, tissue fluids and tissues. This paper investigates the use of He and Ar plasma jets to deliver three RONS (hydrogen peroxide—H 2 O 2 , nitrite— and nitrate— ) and molecular oxygen (O 2 ) directly into deionised (DI) water, or indirectly into DI water through an agarose target. The DI water is used in place of tissue fluid and the agarose target serves as a surrogate of tissue. Direct plasma jet treatments deliver more RONS and O 2 than the through-agarose treatments for equivalent treatments times. The former only deliver RONS whilst the plasma jets are ignited; the latter continues to deliver RONS into the DI water long after the plasmas are extinguished. The He plasma jet is more effective at delivering H 2 O 2 and directly into DI water, but the Ar plasma jet is more effective at nitrating the DI water in both direct and through-agarose treatments. DI water directly treated with the plasma jets is deoxygenated, with the He plasma jet purging more O 2 than the Ar plasma jet. This effect is known as ‘sparging’. In contrast, for through-agarose treatments both jets oxygenated the DI water. These results indicate that in the context of direct and indirect plasma jet treatments of real tissue fluids and tissue, the choice of process gas (He or Ar) could have a profound effect on the concentrations of RONS and O 2 . Irrespective of operating gas, sparging of tissue fluid (in an open wound) for long prolonged periods during direct plasma jet treatment, could have implications for healthy tissue function; whilst through-tissue plasma jet treatment may provide a method to reperfuse oxygen-starved tissue. The assays described in this paper can be readily adopted (by others) and may support the future development of plasma sources to deliver specific (metered) doses of RONS.
13 November 2017 in Japanese Journal of Applied Physics
Plasma-activated water (PAW) is receiving much attention in biomedical applications because of its reported potent bactericidal properties. Reactive oxygen and nitrogen species (RONS) that are generated in water upon plasma exposure are thought to be the key components in PAW that destroy bacterial and cancer cells. In addition to developing applications for PAW, it is also necessary to better understand the RONS chemistry in PAW in order to tailor PAW to achieve a specific biological response. With this in mind, we previously developed a UV–vis spectroscopy method using an automated curve fitting routine to quantify the changes in H 2 O 2 , NO 2− , NO 3− (the major long-lived RONS in PAW), and O 2 concentrations. A major advantage of UV–vis is that it can take multiple measurements during plasma activation. We used the UV–vis procedure to accurately quantify the changes in the concentrations of these RONS and O 2 in PAW. However, we have not yet provided an in-depth commentary of how we perform the curve fitting procedure or its implications. Therefore, in this study, we provide greater detail of how we use the curve fitting routine to derive the RONS and O 2 concentrations in PAW. PAW was generated by treatment with a helium plasma jet. In addition, we employ UV–vis to study how the plasma jet exposure time and treatment distance affect the RONS chemistry and amount of O 2 dissolved in PAW. We show that the plasma jet exposure time principally affects the total RONS concentration, but not the relative ratios of RONS, whereas the treatment distance affects both the total RONS concentration and the relative RONS concentrations.
The authors report on the field emission from an aligned carbon nanotube (CNT) bundle grown by thermal chemical vapor deposition. The CNT bundle showed a low-threshold electric field of that produced a current density of , sustainable evolution of current density up to at , and good emission stability without degradation for of continuous dc emission. By calculating the electric-field distribution, it was found that the electric field was significantly higher at the edge of the CNT bundle than at the center. The excellent field-emission properties of the aligned CNT bundle were attributed to the edge effect and the high-density structure.
1 January 2007 in Journal of the Society for Information Display
Cold atmospheric plasmas have attracted significant worldwide attention for their potential beneficial effects in cancer therapy. In order to further improve the effectiveness of plasma in cancer therapy, it is important to understand the generation and transport of plasma reactive species into tissue fluids, tissues and cells, and moreover the rates and depths of delivery, particularly across physical barriers such as skin. In this study, helium (He) plasma jet treatment of a 3D cancer tumour, grown on the back of a live mouse, induced apoptosis within the tumour to a depth of 2.8 mm. The He plasma jet was shown to deliver reactive oxygen species through the unbroken skin barrier before penetrating through the entire depth of the tumour. The depth and rate of transport of He plasma jet generated H 2 O 2 , NO 3− and NO 2− , as well as aqueous oxygen [O 2 (aq)], was then tracked in an agarose tissue model. This provided an approximation of the H 2 O 2 , NO 3− , NO 2− and O 2 (aq) concentrations that might have been generated during the He plasma jet treatment of the 3D tumour. It is proposed that the He plasma jet can induce apoptosis within a tumour by the ‘deep’ delivery of H 2 O 2 , NO 3− and NO 2− coupled with O 2 (aq); the latter raising oxygen tension in hypoxic tissue.