A high-precision micro-displacement sensor based on tunnel magneto-resistance effect is reported.We designed and simulated magnetic characteristics of the sensor, and employed chip-level Au-In bonding to implement low-temperature assembly of the TMR devices. We employed the subdivision interpolation technique to enhance the resolution by translating the sine-cosine outputs of a TMR sensor into an output that varies linearly with the displacement. Simultaneously, using the multi-bridge circuit method to suppress external magnetic and geomagnetic interference. Experimental result shows that the micro-displacement sensor has a resolution of 800 nm, accuracy of 0.14 $$\%$$% and a full-scale range of up to millimeter level. This work enables a high-performance displacement sensor, and provides a significant guide for the design of a micro-displacement sensor in practical applications.

We demonstrate a novel, to the best of our knowledge, micro-opto-electro-mechanical system (MOEMS) gyroscope based on the Talbot effect of a single-layer near-field diffraction grating. The Talbot effect of an optical grating is studied both theoretically and experimentally. A structure of grating–mirror combination, fabricated by the micro–nano processing method, is used for out-of-plane structure detection. The detection of a weak Coriolis force is realized by using the highly sensitive displacement characteristic of Talbot imaging of near-field diffraction with a mirror mass block and single-layer grating. The experimental results show that, the micro-displacement detection sensitivity can reach up to 0.09%/nm, and the MOEMS gyroscope can be moved in the driven direction, with a resonant frequency of 7048 Hz and a quality factor of 700, which indicates great potential of the Talbot effect in developing novel high-performance micro-gyroscopes.

In this paper, we present the design, fabrication, and test of a micro-opto-electro-mechanical systems (MOEMS) accelerometer based on the Talbot effect of double-layer diffraction gratings. The detection of acceleration is realized by using the highly sensitive displacement characteristic of Talbot imaging of near-field diffraction with double-layer gratings. For the purpose of obtaining optimal contrast of the optical interferometric detection, the parameters of the gratings are optimized by the finite-difference time-domain (FDTD) simulation. The experimental results indicate that this MOEMS accelerometer with the proposed design can achieve a resolution of 246 µg, sensitivity of 6.1 V/g, and bias stability of 0.02 mg. The proposed accelerometer can be operated at higher accelerations ( ∼ 80 g ), which shows significant potential for being used in applications that require detection of strong and fast vibrations, especially in vibration sensing of vehicles and geophysical seismic sensing in real time.

Laser light with spectral purity and frequency stability is pursued in precision spectroscopy and precision measurements. We propose a scheme to generate millihertz-linewidth laser light with a frequency instability of 10⁻¹⁸ via optical four-wave mixing in alkaline-earth atoms. We show that the linewidth of the mixing laser light is ultimately limited by the natural linewidth of the atomic transition rather than by the linewidth of the input lasers. The frequency stability of the mixing laser light depends largely on the intensity stability of the input lasers. It is possible to generate a millihertz-linewidth laser light with a frequency instability of 10⁻¹⁸ and a power of 10⁻¹² W when the input lasers with a relative intensity instability of 10⁻⁴ and a spectral width of 1 Hz interact with strontium (Sr) atoms with a density of 1 × 10¹¹ cm⁻³.

An ultrasensitive single-axis in-plane micro-optical-electro-mechanical-system (MOEMS) accelerometer based on the Talbot effect of dual-layer gratings is proposed. Based on the Talbot effect of gratings, the acceleration can be converted into the variation of diffraction intensity, thus changing the voltage signal of photodetectors. We investigated and optimized the design of the mechanical structure; the resonant frequency of the accelerometer is 1878.9 Hz and the mechanical sensitivity is 0.14 μm/g. And the optical grating parameters have also optimized with a period of 4 μm and a grating interval of 10 μm. The experimental results demonstrated that the in-plane MOEMS accelerometer with an optimal design achieved an acceleration sensitivity of 0.74 V/g (with better than 0.4% nonlinearity), a bias stability of 75 μg and an acceleration resolution of 2.0 mg, suggesting its potential applications in smartphones, automotive electronics, and structural health detection.

On the basis of the self-interference effect between ± 1 st-order diffraction beams from a single optical submicrometer grating, we demonstrate a single-detecting-path optical displacement sensor with high resolution. Using a quadrant optoelectronic detector, a single-detecting-path system without any wave plates is realized experimentally. Combined with an interpolation circuit, we demonstrate the system for displacement measurement within a range of 200 µm. The results indicate a detecting sensitivity of 905.4°/µm and an accuracy of ± 1 . 9 µ m . It is worth mentioning that, considering a maximum subdividing factor of 9674 used in experiment, the resolution goes down to 41.1 pm in principle. We demonstrate a compact optical sensor with high resolution, which is promising in developing miniaturized displacement systems.