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Dr. Ming Lu

Brookhaven National Laboratory

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0000-0003-0175-6531

Research Keywords & Expertise

MEMS

Nanofabrication

Photonics

Plasma Etching

X-ray

e-beam lithography

Co-authors
215
Chonghang Zhao
Brookhaven National Laborato...
Daewoong Nam
Pohang Accelerator Laborator...
Emil Bozin
Condensed Matter Physics and...
Jaehyun Park
Lei Huang
Optics Metrology Group, Ener...
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