Atomic layer deposition (ALD), a gas-phase thin film deposition technique based on repeated, self-terminating gas–solid reactions, has become the method of choice in semiconductor manufacturing and many other technological areas for depositing thin conformal inorganic material layers for various applications. ALD has been discovered and developed independently, at least twice, under different names: atomic layer epitaxy (ALE) and molecular layering. ALE, dating back to 1974 in Finland, has been commonly known as the origin of ALD, while work done since the 1960s in the Soviet Union under the name “molecular layering” (and sometimes other names) has remained much less known. The virtual project on the history of ALD (VPHA) is a volunteer-based effort with open participation, set up to make the early days of ALD more transparent. In VPHA, started in July 2013, the target is to list, read and comment on all early ALD academic and patent literature up to 1986. VPHA has resulted in two essays and several presentations at international conferences. This paper, based on a poster presentation at the 16th International Conference on Atomic Layer Deposition in Dublin, Ireland, 2016, presents a recommended reading list of early ALD publications, created collectively by the VPHA participants through voting. The list contains 22 publications from Finland, Japan, Soviet Union, United Kingdom, and United States. Up to now, a balanced overview regarding the early history of ALD has been missing; the current list is an attempt to remedy this deficiency.

The purpose of this work is to improve the operational characteristics of actuators based on ionic polymer-metal composites (IPMC) by improving their manufacture technology. The optimal thickness of the ion-exchange membrane was determined. The technology of metal electrode deposition, the composition of actuator electrolyte solution and the storage method of actuators were optimized.

The actual problem of microrobotic is creating of low cost energy-efficient actuator for mobile microsystems, which are able to simulate the movement of biological objects. In this article, designed and fabricated experimental samples of ionic polymer-metal composite (IPMC) actuators are presented. Highresolution SEM was used to control the electrode thickness and structure. Method of focused ion beam was used to study the structure of IPMC. Precision sample sections were obtained using focused ion beam. Platinum electrodes consist of two distinct layers of the platinum particles differing in morphology. The distribution of the platinum particles in the depth of the membrane was investigated by X-ray microanalysis. Atomic force microscopy was used for the characterization of surface morphology of IPMC.

Nickel films of 4–250 nm thickness were produced by DC magnetron sputtering onto glass and silicon substrates. The electrical properties of the films were investigated by the four-probe method and the surface morphology of the films was studied by atomic force microscopy. To measure the shielding effectiveness, a portable closed stand based on horn antennas was used. A theoretical assessment of the shielding effectiveness of nickel films of various thickness under electromagnetic radiation of a range of frequencies was carried out using two different approximations. The results demonstrate the shielding effectiveness of up to 35 dB of the nickel thin films in the frequency range of 2–18 GHz.

Polyaniline-based composites designed to ensure the electromagnetic compatibility of electronic devices were obtained. The surface morphologies of the obtained films were studied using optical and electron microscopy. The electrical resistivity of polyaniline (PANI) films were measured at various thicknesses. For films of various compositions and various thicknesses, the frequency dependencies of the complex dielectric permittivity, in the range of 100–2000 kHz, as well as the electromagnetic radiation (EMR) absorption coefficient in the frequency range 0.05–2 GHz were obtained. It was found that flexible gelatin-PANI composite films with a thickness of 200–400 μm, a bending radius of about 5 cm, and a real part of complex permittivity of not more than 10 provide an EMR absorption coefficient of up to 5 dB without introducing additional EMR absorbing or reflecting fillers. The resulting gelatin-PANI composite films do not possess a through electrical conductivity and can be applied directly to the surface of protected printed circuit boards.

Flexible polymer-based actuators, often also called artificial muscles, are an essential part of biomimetic systems that mimic the movement principles of animal world creatures. The most used electrode material to force the actuator move is an ensemble of noble metal nanoparticles in the electroactive polymer surface. Noble metal electrodes have enough electrical conductivity and elasticity and are not subjected to oxidation. However, high cost of such electrodes and their tendency to cracking dictate the need for searching other materials, primarily carbon ones. The review considers several options for this search. For example, carbon nanotubes and graphene have excellent properties at the level of a single individually taken nanotube or graphene sheet. However, conservation of these properties in structurally imperfect film electrodes requires a separate study. In addition, there are problems of compatibility of such electrodes with the polymers that requires cumbersome technologies, e.g., hot pressing, which complicates the production of the actuator as a whole. The review concerns the technology options of manufacturing actuators and the results obtained on their basis, both including hot pressing and avoiding this procedure. In particular, the required level of the graphene oxide reduction in hydrazine provides sufficient adhesion at rather high electrical conductivity of the graphene film. The ability to simultaneous achieving these properties is a nontrivial result, providing the same level of actuation as with expensive noble metal electrodes. Actuators that additionally require greater lifetime resource should be obtained in other ways. Among them are using the graphdiyne electrodes and laser processing of the graphene electrodes.