Since black silicon was discovered by coincidence, the special material was explored for many amazing material characteristics in optical, surface topography, and so on. Because of the material property, black silicon is applied in many spheres of a photodetector, photovoltaic cell, photo-electrocatalysis, antibacterial surfaces, and sensors. With the development of fabrication technology, black silicon has expanded in more and more applications and has become a research hotspot. Herein, this review systematically summarizes the fabricating method of black silicon, including nanosecond or femtosecond laser irradiation, metal-assisted chemical etching (MACE), reactive ion etching (RIE), wet chemical etching, electrochemical method, and plasma immersion ion implantation (PIII) methods. In addition, this review focuses on the progress in multiple black silicon applications in the past 10 years. Finally, the prospect of black silicon fabricating and various applications are outlined.

Herein, a compact refractive index nanosensor comprising a metal- insulator- metal (MIM) waveguide with symmetric two triangle stubs coupled with a circular split-ring resonance cavity (CSRRC) is theoretically presented. An analysis of the propagation characteristics of the designed structure is discussed employing the finite element method (FEM). The calculation results revealed that a Fano resonance outline emerged, which results from an interaction between the continuous broadband state of the waveguide with two symmetric triangle stubs and the discrete narrowband state of the CSRRC. The influence of geometric parameters on sensing properties was studied in detail. The maximum sensitivity reached 1500 nm/RIU with a high figure of merit of 65.2. The presented structure has great applications for on-chip plasmonic nanosensors.

Hydrogen is receiving a lot of attention from researchers as a clean energy source and one of the most promising sources of energy for the future. Detection of hydrogen before it reaches explosive conditions is a central issue in the safe use of hydrogen. Hydrogen sensors are devices that detect the hydrogen concentration in the environment and are capable of outputting an electrical signal proportional to the magnitude of the hydrogen concentration. Palladium (Pd) has become one of the preferred materials for the preparation of hydrogen sensors due to its strong hydrogen absorbing ability. In this paper, the intrinsic mechanism of hydrogen absorption by Pd metal is revealed, and the performance of various types of Pd-based hydrogen sensors is reviewed.

A plasmonic refractive index nanosensor structure consisting of a metal-insulator-metal (MIM) waveguide with two symmetrical rectangle baffles coupled with a connected-concentric-double rings resonator (CCDRR) is presented. In this study, its transmission characteristics were investigated using the finite element method (FEM). The consequences, studied via simulation, revealed that the transmission spectrum of the system presents a sharp asymmetric Fano profile due to the destructive interference between the wide-band mode of two rectangle baffles on the bus waveguide and the narrow-band mode of the CCDRR. The effects of the geometric parameters of the structure on the transmission characteristics were investigated comprehensively. A sensitivity of 2260 nm/RIU and figure of merit (FOM) of 56.5 were the best levels of performance that the designed structure could achieve. In addition, the system could act as a sensor for use for temperature sensing, with a sensitivity that could reach 1.48 nm/°C. The designed structure advances with technology with new detection positions and has good application prospects in other high-sensitivity nanosensor fields, for example, acting as a biosensor to detect the hemoglobin level in the blood.

Herein, a nanosensor structure is proposed, which comprises metal-insulator-metal (MIM) waveguide with stub and circular ring cavity with a stub (CRCS). The phenomenon of Fano resonance appears in the transmission spectrum, which is formed by interaction between the narrowband mode of CRCS and broadband mode of stub on bus waveguide. The influence of geometric asymmetry on mode splitting of Fano resonance was discussed. The mode splitting of Fano resonance can vastly improve figure of merit (FOM) with a sight decrease of sensitivity. The best performance of the refractive-index nanosensor is attained, which is 1420 nm/RIU with a high FOM of 76.76. Additionally, the application of designed structure on temperature sensing was investigated, which has sensitivity of 0.8 nm/°C. The proposed structure also possesses potential applications on other on-chip nanosensors.