This critical review addresses recent developments in integrated microfluidic technologies for cancer detection with an emphasis on three common subtypes of cancer biomarkers: circulating tumor cells, circulating tumor DNA and exosomes.

A capacitive ultrasonic transducer based on a parametric resonator structure is described and experimentally demonstrated. The transducer structure, which we call capacitive parametric ultrasonic transducer (CPUT), uses a parallel plate capacitor with a movable membrane as part of a degenerate parametric series RLC resonator circuit with a resonance frequency of f_o. When the capacitor plate is driven with an incident harmonic ultrasonic wave at the pump frequency of 2f_o with sufficient amplitude, the RLC circuit becomes unstable and ultrasonic energy can be efficiently converted to an electrical signal at f_o frequency in the RLC circuit. An important characteristic of the CPUT is that unlike other electrostatic transducers, it does not require DC bias or permanent charging to be used as a receiver. We describe the operation of the CPUT using an analytical model and numerical simulations, which shows drive amplitude dependent operation regimes including parametric resonance when a certain threshold is exceeded. We verify these predictions by experiments with a micromachined membrane based capacitor structure in immersion where ultrasonic waves incident at 4.28 MHz parametrically drive a signal with significant amplitude in the 2.14 MHz RLC circuit. With its unique features, the CPUT can be particularly advantageous for applications such as wireless power transfer for biomedical implants and acoustic sensing.

There is an increasing interest in wireless power transfer for medical implants, sensor networks, and consumer electronics. A passive capacitive parametric ultrasonic transducer (CPUT) can be suitable for these applications as it does not require a dc bias or a permanent charge. In this paper, we present a 1-D lumped parameter model of the CPUT to study its operation and investigate relevant design parameters for power transfer applications. The CPUT is modeled as an ultrasound-driven piston coupled to an RLC resonator resulting in a system of two coupled nonlinear ordinary differential equations. Simulink is used along with an analytical approximation of the system to obtain the voltage across the capacitor and displacement of the piston. Parametric resonance threshold and ultrasound-to-electrical conversion efficiency are evaluated, and the dependence of these performance metrics on the load resistance, input ultrasound intensity, forcing frequency, electrode coverage area, gap height, and the mechanical Q-factor are studied. Based on this analysis, design guidelines are proposed for highly efficient power transfer. Guided by these results, practical device designs are obtained through COMSOL simulations. Finally, the feasibility of using the CPUT in air is predicted to set the foundation for further research in ultrasonic wireless power transfer, energy harvesting, and sensing.

The generation of electromechanical frequency combs in both air and liquid environments using a capacitive microresonator array is presented in this paper. In contrast to frequency-comb generation in purely mechanical resonators, we show that the damping-dependent threshold for comb generation can be reduced by parametrically coupling a resonant electrical circuit to the mechanical resonator. A one-dimensional lumped parameter model of the proposed system is presented and semianalytical solutions are developed to investigate the parameters influencing frequency-comb formation under various operating conditions. The results obtained with numerical simulations are experimentally validated using a commercially available microelectromechanical resonator, and frequency combs with a repetition rate sensitive to the force on the mechanical resonator are generated with a single electrical drive in air and in a liquid-filled microfluidic channel. In contrast to prior work on electromechanical frequency combs, this work represents a simple yet robust approach to generating stable combs, thereby enabling its practical use in applications, such as gas sensing and microfluidics.

Parametric excitation (PE) has widely been employed as a method of mechanical pre-amplification in nonlinear vibration energy harvesting systems. However, despite their advantages, most current PE systems are limited to degenerate parametric operation within a narrow frequency band around the primary instability tongue. In this paper, we simulate and experimentally demonstrate a parametrically driven capacitive electromechanical resonator having multiple electrical degrees of freedom. Multiple modes allow for several frequency bands in which the electrical resonator is driven into nondegenerate (combination) parametric resonance (PR) in addition to degenerate resonance, thereby enabling operation over a broader range of frequencies while maintaining the same mechanical footprint. These frequency bands and PR thresholds are tunable by simply changing the electrical circuit parameters and PR can be achieved in the presence of high mechanical damping making the method more adaptable than purely mechanical approaches. Experimental results are extended by simulations indicating that proper selection of operating parameters can enable the merging of instability tongues to produce a broadband region of PR for elastic wave energy harvesting thereby obtaining superior performance when compared to an equivalent single degree of freedom PE energy harvester.