High-quality-factor Micro-Electro-Mechanical System (MEMS) resonators have been widely used in sensors and actuators to obtain great mechanical sensitivity. The frequency drift of resonator with temperature is a problem encountered practically. The paper focuses on the resonator frequency distribution law in the temperature range of—40 to 60 °C. The four-layer models were established to analyze thermal stress caused by temperature due to the mismatch of thermal expansion coefficients. The temperature variation leads to the transformation of stress, which leads to the shift of resonance frequency. The paper analyzes the influence of hard and soft adhesive package on the temperature coefficient of frequency. The resonant accelerometer was employed for the frequency measurements in the paper. In experiments, three types of adhesive dispensing patterns were implemented. The results are consistent with the simulation well. The optimal packaging method achieves −24.1 ppm/°C to −30.2 ppm/°C temperature coefficient of the resonator in the whole temperature range, close to the intrinsic property of silicon (−31 ppm).

In this article, a compact thermoelectric cooler (TEC)-controlled micro-electromechanical system (MEMS) gyroscope system is designed, implemented, and characterized. To achieve high-precision measurement of MEMS gyroscopes, it is crucial to stabilize the temperature of the resonator regardless of ambient temperature fluctuations. The character of switching cooling and heating modes by changing the supply current direction allows the setting temperature of the TEC-controlled MEMS gyroscope to be maintained within the fluctuation range of ambient temperature, thereby offering advantages, such as low power consumption and high-quality factor. The feasibility of the TEC-controlled MEMS gyroscope is analyzed and examined by the theoretical model and finite elements analysis (FEA) simulation models. Comparison experiments were performed for the disk resonator gyroscope (DRG) with and without TEC over the temperature range from $- 40~^{\circ }$ C to $+ 60~^{\circ }$ C. The experimental findings highlight a considerable mitigation in the drift observed in the resonant frequency, $Q$ -factor, bias, and scale factor concerning changes in ambient temperature. Particularly noteworthy is the temperature sensitivity observed within the $0~^{\circ }$ C– $30~^{\circ }$ C range. The measured temperature sensitivity of the gyroscope with and without TEC is as follows: 0.96 and −19.78 ppm/K for the resonant frequency, 68 and −2036 ppm/K for the $Q$ -factor, $5.34\times 10$ ^−4°/s/K and $362.35\times 10$ ^−4°/s/K for the bias, and 210 and 274 ppm/K for the scale factor, respectively. This substantiates the potential of TEC as a promising temperature control unit for MEMS vibration gyroscopes.

Disc gyroscope manufactured through microelectromechanical systems (MEMS) fabrication processes becomes one of the most critical solutions for achieving high performance. Some reported novel disc constructions acquire good performance in bias instability, scale factor nonlinearity, etc. However, antivibration characteristics are also important for the devices, especially in engineering applications. For multi-ring structures with central anchors, the out-of-plane motions are in the first few modes, easily excited within the vibration environment. The paper presents a multi-ring gyro with good dynamic characteristics, operating at the first resonant mode. The design helps obtain better static performance and antivibration characteristics with anchor points outside of the multi-ring resonator. According to harmonic experiments, the nearest interference mode is located at 30,311 Hz, whose frequency difference is 72.8% far away from working modes. The structures were fabricated with silicon on insulator (SOI) processes and wafer-level vacuum packaging, where the asymmetry is 780 ppm as the frequency splits. The gyro also obtains a high Q-factor. The measured value at 0.15 Pa was 162 k, which makes the structure have sizeable mechanical sensitivity and low noise.

MEMS lumped mass gyroscopes, widely used in industrial applications, have not yet reached the navigation grade. This article proposes a novel MEMS quadruple mass gyroscope (QMG) that exhibits superior overall performance in terms of bias instability (BI), angle random walk (ARW), size, and robustness. This superior overall performance is achieved via a dual-umbrella-like driving architecture (DULDA). Specifi-cally, the DULDA is utilized to enhance the driving displacement by 80% and the effective mass by 180% without increasing the layout area. The DULDA also allows a single driving frame to drive four proof masses for anti-phase motion simultaneously. In addition, the DULDA, combined with a coupling mechanism for the sensing mode, positions the two operating modes in the first two orders and yields a frequency split of 5.49 kHz between the operating mode and the parasitic mode. The QMG is fabri-cated using MEMS processes and features wafer-level vacuum packaging, with structural layer dimensions of only 3.9 mm × 3.1 mm. Without any compensation, the proposed QMG achieves a BI of 0.26°/h and an ARW of 0.02°/√h within a full scale of ± 150°/s, making a 90% reduction in BI and a 150% decrease in ARW compared with a QMG without the DULDA. Consequently, the proposed QMG, with its advanced driving architecture, offers a promising solution for angular measure-ment in high-end industrial applications.

Although the force rebalance solves the bandwidth expansion problem of MEMS gyroscopes with mode matching, it faces a trade-off between high resolution and large range. To solve this issue, this paper proposes a Collaborative Force Rebalance (CFRB) strategy for MEMS gyroscopes. The method utilizes a distribution algorithm to enable force rebalance electrodes with different capacitance parameters to work together, achieving both high resolution and large range. An Eight-Mass Gyroscope (EMG) with feedback electrodes of varying electrostatic force efficiencies is designed to adapt the CFRB strategy. The influence of different feedback efficiencies on the output noise in force rebalance mode and the methods for noise reduction was analyzed. The feasibility of CFRB is verified through simulation. Experimental results demonstrate that the MEMS gyroscope achieves a resolution of 0.002 °/s and a range of at least ±1000 °/s with a scale factor nonlinearity of 106 ppm. Static testing in CFRB mode shows Bias Instability of 0.3 °/h and Angle Random Walk of 0.1 °/√h.