Precise and fast determination of position and orientation, which is normally achieved by distance and angle measurements, has broad applications in academia and industry. We propose a dynamic three-degree-of-freedom measurement technique based on dual-comb interferometry and a self-designed grating-corner-cube (GCC) combined sensor. Benefiting from its unique combination of diffraction and reflection characteristics, the absolute distance, pitch, and yaw of the GCC sensor can be determined simultaneously by resolving the phase spectra of the corresponding diffracted beams. We experimentally demonstrate that the method exhibits a ranging precision (Allan deviation) of 13.7 nm and an angular precision of 0.088 arcsec, alongside a 1 ms reaction time. The proposed technique is capable of precise and fast measurement of distances and two-dimensional angles over long stand-off distances. A system with such an overall performance may be potentially applied to space missions, including in tight formation-flying satellites, for spacecraft rendezvous and docking, and for antenna measurement as well as the precise manufacture of components including lithography machines and aircraft-manufacturing devices.
A simplified phase-stable dual-comb interferometer for absolute distance measurement within a short dynamic range is proposed in this paper. The experimental results demonstrate that stable phase-difference information and lower timing jitter can be obtained within a time delay of 2000 ns between the reference interference signal and measurement interference signal. Using the proposed technique, the time-of-flight (TOF) result can link directly to the carrier-wave interferometric (CWI) result in an average time of 20 ms and can reach 2 nm precision in 0.5 s averaging time. Millimeter-scale measurement dynamic range and nanometer-level precision can thus be achieved without additional noise suppression. This method can also be applied at different stand-off distances.
A multi-pulse sampling dual-comb ranging (MS-DCR) method is proposed in this paper. Four sampling pulses and two signal pulses separated in the time domain are generated in a repetition period by fiber delay. Through multi-pulse linear optical sampling, eight cross-correlation interferograms (IGMs) are generated in an updating period. The proposed method realizes the multiplication of IGMs so that additional ranging results can be obtained. The experimental results demonstrate that we suppress any random noise by averaging the ranging results and improve the precision of the time-of-flight (TOF) method and carrier-wave interferometric (CWI) method simultaneously. The precision of TOF is improved from 3.85 µm to 1.39 µm without time averaging and that of CWI is improved from 25 nm to 11 nm. The TOF result can link to the interferometric phase with 15 ms averaging, and a precision of 0.48 nm is reached with 0.5 s averaging. The proposed technique overcomes the limitations of linear optical sampling in conventional dual-comb interferometers and achieves faster and higher precision distance measurements without decreasing the unambiguity range.
A dual-comb ranging (DCR) system without spectral aliasing based on free-running fiber lasers was proposed. By monitoring the repetition frequency over time, we compensate for the instability of the optical pulse train from the free-running fiber lasers. We demonstrated a double-channel filtering structure that eliminates the aliasing between multiheterodyne beats in radio frequency interferograms. Without any frequency locking, the DCR system implements stable running for at least 60 min. The system realizes a 6-µm repetition precision without averaging and shows good consistency with a commercial interferometer.
Spectroscopic ellipsometry is a powerful tool for characterizing thin film, polarization optics, semiconductors, and others. Conventional approaches are subject to restrictions of mechanical instability and measurement speed. The complex locking scheme of previous dual-comb spectroscopic ellipsometry belies its practicability. We present and demonstrate here dynamic spectroscopic ellipsometry based on a simplified phase-stable dual-comb system, which could realize the online dynamic measurement of optical properties of materials. A precision of 1.31 nm and a combined uncertainty of 13.80 nm (k = 2) in the thickness measurement of thin-film samples has been achieved. Moreover, the dynamic performance of the system is investigated under a high data acquisition rate (1 kHz) with a dynamic resolution of ellipsometric parameter better than 0.1 rad.
This paper presents a specifically designed grating-corner-cube sensor for precise roll angle measurements. Owing to the diffraction characteristics of the transmission grating and reflection characteristics of the corner cube, two spatially separated parallel beams are naturally constructed. Through differential detection of the positions of two parallel beams, we experimentally demonstrate the possibility of a precise roll angle measurement at a high refresh rate. A performance evaluation of the proposed technique indicates a stability of 0.46 arcsec over 5 min. Compared with a commercial autocollimator over a range of 500 arcsec, the residuals are maintained within ±2 arcsec with a standard deviation of 1.37 arcsec. Furthermore, a resolution of 0.8 arcsec can be achieved using the proposed method. The developed compact roll angle sensor has potential applications in academic and industrial fields.