Liyuan Zhang

Ms. Liyuan Zhang


Research Focus & Metrics

Academic Career Length

12Years (2015-Present)

(Calculated once Scilit publication data is synced: current year − year of first publication + 1)

Representative Publications

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2 September 2015 in Sensors
Verified
Journal Article
Open access
PDF file
JLJinxing Liang
Jinxing Liang
LZLiyuan Zhang
Liyuan Zhang
LWLing Wang
Ling Wang
YDYuan Dong
Yuan Dong
TUToshitsugu Ueda
Toshitsugu Ueda
In this study, a novel method to assemble a micro-accelerometer by a flip chip bonding technique is proposed and demonstrated. Both the main two parts of the accelerometer, a double-ended tuning fork and a base-proof mass structure, are fabricated using a quartz wet etching process on Z cut quartz wafers with a thickness of 100 μm and 300 μm, respectively. The finite element method is used to simulate the vibration mode and optimize the sensing element structure. Taking advantage of self-alignment function of the flip chip bonding process, the two parts were precisely bonded at the desired joint position via AuSn solder. Experimental demonstrations were performed on a maximum scale of 4 × 8 mm2 chip, and high sensitivity up to 9.55 Hz/g with a DETF resonator and a Q value of 5000 in air was achieved.