Codeposition of hydrocarbons is a severe problem during focused electron beam writing of pure metal nanostructures. When using organometallic precursors, a low metal content carbonaceous matrix embedding and separating numerous nanosized metal clusters is formed. In this work, we present a new and easy approach to obtain high purity gold lines: the use of inorganic PF3AuCl as a precursor. Electrical resistivities as low as 22 μΩ cm at 295 K (ten times the bulk Au value) were obtained. This is to our knowledge the best value for focused electron beam deposition obtained from the vapor phase so far. No special care was taken to prevent hydrocarbon contamination. The deposited nanostructure consists of gold grains varying in size and percolation with beam parameters.

The authors have experimentally investigated the compressive strength of GaAs pillars with a diameter of $1\mu \mathrm{m}$ by uniaxial compression tests. The tests were performed at room temperature and, contrary to macroscopic tests, the micropillars were found to exhibit ductile plasticity comparable to that of metal single crystal micropillars. The yield stress was $1.8\pm 0.4\mathrm{GPa}$ and, for one pillar that was more closely examined, a total deformation of 24% was observed. In the diffraction patterns from transmission electron microscopy studies of this pillar, a high density of twins was observed.

Experiments have been carried out on how compressive failure of axis GaAs micropillars at room temperature is influenced by their diameter. Slip was observed in all micropillars, often on intersecting slip planes. Cracks could nucleate at these intersections and then grow axially in the sample, with bursts of crack growth. However, GaAs micropillars with diameters less than approximately 1 µm did not split, nor was splitting observed where slip occurred on only one plane. The conditions under which such splitting can occur have been estimated by modifying an existing analysis. This predicts a ductile–brittle transition at a micropillar diameter of approximately 1 µm, consistent with experimental observations.